Design and simulation of ultra high sensitive piezoresistive MEMS sensor with structured membrane for low pressure applications

et al. 2017

Sensors

The influence of diaphragm bending stiffness distribution on the stress concentration characteristics of a pressure sensing chip had been analyzed and discussed systematically. According to the analysis, a novel peninsula-island-based diaphragm structure was presented and applied to two differenet diaphragm shapes as sensing chips for pressure sensors. By well-designed bending stiffness distribution of the diaphragm, the elastic potential energy induced by diaphragm deformation was concentrated above the gap position, which remarkably increased the sensitivity of the sensing chip. An optimization method and the distribution pattern of the peninsula-island based diaphragm structure were also discussed. Two kinds of sensing chips combined with the peninsula-island structures distributing along the side edge and diagonal directions of rectangular diaphragm were fabricated and analyzed. By bonding the sensing chips with anti-overload glass bases, these two sensing chips were demonstrated by testing to achieve not only high sensitivity, but also good anti-overload ability. The experimental results showed that the proposed structures had the potential to measure ultra-low absolute pressures with high sensitivity and good anti-overload ability in an atmospheric environment.

Section: Introductionmentioning

confidence: 99%

Application and Optimization of Stiffness Abruption Structures for Pressure Sensors with High Sensitivity and Anti-Overload Ability

et al. 2017

Sensors

“…To develop a micro-pressure sensor with high sensitivity and overload resistance is of importance and necessity to meet the growing demand in the aerospace field. To some degree the chip structure determines the sensitivity, linearity, and overload resistance [7,8,10]. The lower the pressure range is, the thinner the diaphragm is needed to maintain high sensitivity.…”

Section: Introductionmentioning

confidence: 99%

“…It has been employed in a wide variety of applications in consequence of its excellent linearity and fine sensitivity as well as simple and direct signal transduction mechanism between the mechanical and the electrical domains [2][3][4]. Especially, with the development of the technology of aerospace engineering, a number of piezoresistive pressure sensors are desired for micro pressure measurements [5][6][7][8][9]. For instance, the aircraft altimetry can be obtained through the measurements of pressure, according to the relationship between pressure and height.…”

Section: Introductionmentioning

confidence: 99%

Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

et al. 2014

The paper presents a piezoresistive absolute micropressure sensor for altimetry. This investigation includes the design, fabrication and testing of the sensor. An improved structure is studied through incorporating sensitive beams into the bosseddiaphragm structure. By analyzing the stress distribution of sensitive elements using finite element method (FEM), the configuration shows an enhanced sensitivity and a proper overload resistance. Equations about surface stress and deflection of the sensor are established by multivariate fittings based on ANSYS loop calculation results. Structure dimensions are optimized and determined by MATLAB. Silicon bulk micromachining technology is utilized to fabricate the sensor prototype, and the processing is discussed. The outputs under both static and dynamic conditions are tested. Experimental results demonstrate the sensor features a relatively high sensitivity of 11.655 V/V/Pa in the operating range of 500 Pa at room temperature and a proper overload resistance of 200 times overpressure to promise its survival under atmosphere. The favorable performances enable the sensor's application in measuring absolute micro pressure.

“…Most equipment requires the use of sensor technology to monitor its working status in terms of collecting spindle vibration, cutting force, working temperatures [ 1 , 2 , 3 , 4 , 5 ], etc. In particular, with the development of aviation engineering technology a number of piezoresistive pressure sensors are desired for micro-pressure measurements [ 6 , 7 , 8 , 9 ].…”

Section: Introductionmentioning

confidence: 99%

The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor

Meng

2016

Sensors

A piezoresistive pressure sensor with a beam-membrane-dual-island structure is developed for micro-pressure monitoring in the field of aviation, which requires great sensitivity and overload resistance capacity. The design, fabrication, and test of the sensor are presented in this paper. By analyzing the stress distribution of sensitive elements using the finite element method, a novel structure incorporating sensitive beams with a traditional bossed diaphragm is built up. The proposed structure proved to be advantageous in terms of high sensitivity and high overload resistance compared with the conventional bossed diaphragm and flat diaphragm structures. Curve fittings of surface stress and deflection based on ANSYS simulation results are performed to establish the sensor equations. Fabricated on an n-type single crystal silicon wafer, the sensor chips are wire-bonded to a printed circuit board (PCB) and packaged for experiments. The static and dynamic characteristics are tested and discussed. Experimental results show that the sensor has a sensitivity as high as 17.339 μV/V/Pa in the range of 500 Pa at room temperature, and a high overload resistance of 200 times overpressure. Due to the excellent performance, the sensor can be applied in measuring micro-pressure lower than 500 Pa.