Design and Testing of a Non-Contact MEMS Voltage Sensor Based on Single-Crystal Silicon Piezoresistive Effect

Li, Jiachen; Li, Jun; Peng, Chunrong; Liu, Xiangming; Wu, Zhengwei; Zheng, Fengjie

doi:10.3390/mi13040619

Cited by 17 publications

(7 citation statements)

References 23 publications

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“…Another passive MEMS structure with a piezoresistive readout was presented by Li et al [27] and used in [28] for measurements of AC field strength to back-calculate the voltage on a cable. Also, piezoelectric readout has been applied to quantify the deflections of the movable structure.…”

Section: Passive Force-based Principlementioning

confidence: 99%

Review on sensors for electric fields near power transmission systems

Hortschitz,

Kainz,

Beigelbeck

et al. 2024

Meas. Sci. Technol.

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Due to the necessary transition to renewable energy, the transport of electricity over long distances will become increasingly important, since the sites of sustainable electricity generation, such as wind or solar power parks, and the place of consumption can be very far apart. Currently, electricity is mainly transported via overhead AC lines. However, studies have shown that for long distances, transport via DC offers decisive advantages. To make optimal use of the existing route infrastructure, simultaneous AC and DC, or hybrid transmission, should be employed. The resulting electric field strengths must not exceed legally prescribed thresholds to avoid potentially harmful effects on humans and the environment. However, accurate quantification of the resulting electric fields is a major challenge in this context, as they can be easily distorted (e.g., by the measurement equipment itself). Nonetheless knowledge of the undisturbed field strengths from DC up to several multiples of the fundamental frequency of the power-grid (up to 1\,kHz) is required to ensure compliance with the thresholds. Both AC and DC electric fields can result in the generation of corona ions in the vicinity of the line. In the case of pure AC fields, the corona ions generated typically recombine in the immediate vicinity of the line and, therefore, have no influence on the field measurement further away. Unfortunately, this assumption does not hold for DC fields and hybrid fields, where corona ions can be transported far away from the line (e.g., by wind), and potentially interact with the measurement equipment yielding incorrect measurement results. This review will provide a comprehensive overview of the current state-of-the-art technologies and methods which have been developed to address the problems of measuring the electric field near hybrid power lines.

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Section: Passive Force-based Principlementioning

confidence: 99%

Review on sensors for electric fields near power transmission systems

Hortschitz,

Kainz,

Beigelbeck

et al. 2024

Meas. Sci. Technol.

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“…Capacitive voltage transformers are mainly used in power grids above 330 kV, which are large, expensive, and not easy to install and cannot meet the requirements of low-cost distributed devices [6]. The non-intrusive voltage measurement method realized by the electric field coupling principle has a series of advantages such as low insulation difficulty, simple structure, wide dynamic range, and fast transient response, which caters to the future need for intelligent voltage sensors in power systems and becomes a new direction for voltage measurement technology [7][8][9][10][11][12][13][14]. For transmission lines, non-invasive voltage measurement schemes based on the principle of capacitive coupling are less available, and the accuracy of the measurement cannot be guaranteed due to the change in the coupling capacitance value between the sensor system and the conductor to be measured due to different measurement environments [15][16][17].…”

Section: Introductionmentioning

confidence: 99%

Research on Non-Invasive Floating Ground Voltage Measurement and Calibration Method

Suo

Zhou

et al. 2023

Electronics

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Voltage measurement is an important part of power system operation, and non-intrusive voltage sensors have the advantages of low insulation difficulty, simple structure, easy loading and unloading, and high construction safety, which have become a new direction for voltage measurement. Based on the principle of electric field coupling, this paper constructs a non-intrusive floating ground three-capacitance voltage measurement model, which can complete the accurate measurement of voltage without connecting with the line to be measured and the earth in the measurement process. In non-intrusive voltage measurement, the change of the object to be measured or the measurement environment will cause the change of the coupling capacitance, which leads to the uncertainty of the transmission relationship of the sensor and the large error of measurement results. In order to solve this problem, a new method of sensor calibration is proposed in this paper. By sampling capacitance in parallel between two electrodes of the sensor, changing the capacitance value, and establishing an input output equation, the coupling capacitance value and the voltage value to be measured under different operating conditions are solved. In addition, the sampling capacitance is often several orders of magnitude larger than the sensor’s own capacitance, making the sensor’s voltage division ratio significantly higher and more conducive to the measurement of high voltages. The experimental results show that the measurement error is less than 2%, which verifies the feasibility of the method and the accuracy of the voltage measurement.

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“…The realm of tactile sensing has witnessed remarkable advancements with the emergence of ultrathin conducting or semiconducting materials. Among these materials, notable contenders such as MXene [2], single-crystal silicon nanomembranes [5,6], conjugated polymer-based nanocomposites [7], graphene [8], and molybdenum-disulfide (MoS 2 ) [9][10][11] have garnered substantial attention for their potential in the development of tactile sensors. This review will highlight the latest advancements in FPCs for tactile sensing.…”

Section: Introductionmentioning

confidence: 99%

Emerging Functional Polymer Composites for Tactile Sensing

2023

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In recent years, extensive research has been conducted on the development of high-performance flexible tactile sensors, pursuing the next generation of highly intelligent electronics with diverse potential applications in self-powered wearable sensors, human–machine interactions, electronic skin, and soft robotics. Among the most promising materials that have emerged in this context are functional polymer composites (FPCs), which exhibit exceptional mechanical and electrical properties, enabling them to be excellent candidates for tactile sensors. Herein, this review provides a comprehensive overview of recent advances in FPCs-based tactile sensors, including the fundamental principle, the necessary property parameter, the unique device structure, and the fabrication process of different types of tactile sensors. Examples of FPCs are elaborated with a focus on miniaturization, self-healing, self-cleaning, integration, biodegradation, and neural control. Furthermore, the applications of FPC-based tactile sensors in tactile perception, human–machine interaction, and healthcare are further described. Finally, the existing limitations and technical challenges for FPCs-based tactile sensors are briefly discussed, offering potential avenues for the development of electronic products.

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Design and Testing of a Non-Contact MEMS Voltage Sensor Based on Single-Crystal Silicon Piezoresistive Effect

Cited by 17 publications

References 23 publications

Review on sensors for electric fields near power transmission systems

Review on sensors for electric fields near power transmission systems

Research on Non-Invasive Floating Ground Voltage Measurement and Calibration Method

Emerging Functional Polymer Composites for Tactile Sensing

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