Design and Verification of Nearly Ideal Flow and Heat Transfer in a Rotating Disk Chemical Vapor Deposition Reactor

Breiland, William G.; Evans, Gregory H.

doi:10.1149/1.2085878

Cited by 92 publications

(42 citation statements)

References 16 publications

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“…It is an important engineering application where transitions from stable to unstable (and undesirable) flows have been seen experimentally [2]. The flow stability problem is complex because of competing flow effects due to forced convection at the inlet of the reactor, rotationally-driven convection at a spinning disk in the reactor, and buoyancydriven flow due to large temperature gradients.…”

Section: Numerical Experiments and Discussionmentioning

confidence: 99%

Massively parallel linear stability analysis with P_ARPACK for 3D fluid flow modeled with MPSalsa

Lehoucq

Salinger

1998

Lecture Notes in Computer Science

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Abstract. We are interested in the stability of three-dimensional fluid flows to small disturbances. One computational approach is to solve a sequence of large sparse generalized eigenvalue problems for the leading modes that arise from discretizating the differential equations modeling the flow. The modes of interest are the eigenvalues of largest real part and their associated eigenvectors. We discuss our work to develop an efficient and reliable eigensolver for use by the massively parallel simulation code MPSalsa. MPSalsa allows simulation of complex 3D fluid flow, heat transfer, and mass transfer with detailed bulk fluid and surface chemical reaction kinetics.

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Section: Numerical Experiments and Discussionmentioning

confidence: 99%

Massively parallel linear stability analysis with P_ARPACK for 3D fluid flow modeled with MPSalsa

Lehoucq

Salinger

1998

Lecture Notes in Computer Science

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“…The susceptor is rotated at 1200 rpm. The rotating speed in combination with the reactor pressure and susceptor temperature determine the total gas flow rate required to maintain a matched flow pattern [9]. Flow rates of TMGa and NHS are kept at 130pmol/min and 6.0slm respectively to give a high temperature growth rate of approximately 2.3pm/hr.…”

Section: Methodsmentioning

confidence: 99%

The Effect of Hydrogen Carrier Gas on the Morphological Evolution and Material Properties of GaN on Sapphire

Han

Biefeld

et al. 1997

MRS Proc.

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In-situ optical reflectance is used to monitor the morphological evolution of the two-step GaN growth on sapphire. The amount of H2 carrier gas used in the growth is observed to strongly influence the morphological evolution of the low temperature buffer layer and the subsequent high temperature nucleation behavior, which in turn affects the structural and electrical properties of the GaN epitaxial films. The optical reflectance transients correlate with the sizes and distributions of nuclei as observed by AFM.

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“…The high speed rotating disk design has been demonstrated analytically and experimentally to provide excellent uniformity. 64,65 Both reactor designs are theoretically scalable to any size wafer platter. Uniform deposition of BST films has been demonstrated in both planetary 66 and high speed rotating disk MOCVD reactors.…”

Section: E Mocvdmentioning

confidence: 99%

Challenges and opportunities for multi-functional oxide thin films for voltage tunable radio frequency/microwave components

Subramanyam¹,

Cole²,

Sun³

et al. 2013

Journal of Applied Physics

147

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There has been significant progress on the fundamental science and technological applications of complex oxides and multiferroics. Among complex oxide thin films, barium strontium titanate (BST) has become the material of choice for room-temperature-based voltage-tunable dielectric thin films, due to its large dielectric tunability and low microwave loss at room temperature. BST thin film varactor technology based reconfigurable radio frequency (RF)/microwave components have been demonstrated with the potential to lower the size, weight, and power needs of a future generation of communication and radar systems. Low-power multiferroic devices have also been recently demonstrated. Strong magneto-electric coupling has also been demonstrated in different multiferroic heterostructures, which show giant voltage control of the ferromagnetic resonance frequency of more than two octaves. This manuscript reviews recent advances in the processing, and application development for the complex oxides and multiferroics, with the focus on voltage tunable RF/microwave components. The over-arching goal of this review is to provide a synopsis of the current state-of the-art of complex oxide and multiferroic thin film materials and devices, identify technical issues and technical challenges that need to be overcome for successful insertion of the technology for both military and commercial applications, and provide mitigation strategies to address these technical challenges. V C 2013 AIP Publishing LLC.

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Design and Verification of Nearly Ideal Flow and Heat Transfer in a Rotating Disk Chemical Vapor Deposition Reactor

Cited by 92 publications

References 16 publications

Massively parallel linear stability analysis with P_ARPACK for 3D fluid flow modeled with MPSalsa

Massively parallel linear stability analysis with P_ARPACK for 3D fluid flow modeled with MPSalsa

The Effect of Hydrogen Carrier Gas on the Morphological Evolution and Material Properties of GaN on Sapphire

Challenges and opportunities for multi-functional oxide thin films for voltage tunable radio frequency/microwave components

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