Design, fabrication and characterization of SAW devices on LiNbO3 bulk and ZnO thin film substrates

Hu, Mingkai; Duan, Franklin Li

doi:10.1016/j.sse.2018.08.005

Cited by 26 publications

(7 citation statements)

References 8 publications

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“…Magnetic field H is applied in the xz plane with an angle θ H from the z axis, resulting in the magnetization in the xz plane with an angle θ from the z axis. symmetry (36), the propagation direction dependence of the nonreciprocity and its close relationship with the evolution of v SAW show that the nonreciprocity is also controlled by the crystal symmetry, and the angular momentum L z originates from the piezoelectric substrate with the xz mirror symmetry breaking.…”

Section: Crystal Origin Of the Phononic Angular Momentummentioning

confidence: 87%

Nonreciprocal magnetoacoustic waves with out-of-plane phononic angular momenta

Liao,

Chen,

Puebla

et al. 2024

Sci. Adv.

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Surface acoustic wave (SAW) can carry phononic angular momentum, showing great potential as an energy-efficient way to control magnetism. Still, out-of-plane phononic angular momentum in SAW and its interaction with magnetism remain elusive. Here, we studied the SAW-induced magnetoacoustic waves and spin pumping in Ni-based films on LiNbO 3 with selected SAW propagation direction. The crystal inversion asymmetry induces circularly polarized phonons with large out-of-plane angular momenta so that up to 60% of the SAW power attenuates nonreciprocally controlled by the out-of-plane magnetization component. The SAW propagation direction dependence of the nonreciprocity verifies the crystal origin of the phononic angular momentum, and a chiral spin pumping demonstrates that the circular polarization can control the spin current generation efficiency. These results provide an additional degree of freedom for the acoustic control of magnetism and open an avenue for applying circularly polarized phonons.

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Section: Crystal Origin Of the Phononic Angular Momentummentioning

confidence: 87%

Nonreciprocal magnetoacoustic waves with out-of-plane phononic angular momenta

Liao,

Chen,

Puebla

et al. 2024

Sci. Adv.

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“…Both the heat damage to the edges of the resonators and the limited depth of the trenches reduce the edge reflectivity, thus increasing energy losses and reducing the quality factor. Additionally, the number, shape, height, and dimensions of IDT fingers affect the quality factor of the SAW resonators [79][80][81]. Optimizing them can help reduce energy losses and increase the quality factor.…”

Section: Sensor Validationmentioning

confidence: 99%

Measurement of the electric permittivity using Bleustein–Gulyaev wave sensor

Elhady

Abdel‐Rahman

2022

J. Micromech. Microeng.

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We present a novel compact electric permittivity sensor that exploits Bleustein-Gulyaev (BG) waves propagating along the surface of shear-poled piezoelectrics. We formulate the dynamic nonlinear electromechanical partial differential equations of motion governing wave propagation under electromagnetically quasistatic conditions. The permittivity of the medium-under-test was found to influence the sensor eigenvalues, enabling the implementation of a frequency-shift permittivity sensor. Solution of the equations of motion demonstrates resonance of the first and third modes when excited using an IDT. We fabricated two sensor prototypes on shear-poled PZT4 and LiNbO3 substrates and used a Vector Network Analyzer to observe the shift in their fundamental natural frequency in the presence of various media-under-test. S11 measurements show deterministic and repeatable shifts in the resonant frequency of the first mode of the LiNbO3 sensor measured at △f1=3.51 MHz for ethanol and △f1=7.49 MHz for deionized water where the bare surface frequency was initially at f1=25.27 MHz.

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“…LiNO 3 shows high thermal stability (T c = 1140 • C), thus LiNO 3 SAW devices are very appropriate for high temperature applications. Duan et al have reported LiNO 3 SAW device for wireless sensor application with well temperature dependency [51]. The temperature coefficient of frequency of 16 µm wavelength devices was −87.5 ppm/ • C and was −72.41 ppm/ • C for 12 µm wavelength devices.…”

Section: Surface Acoustic-wave Devicesmentioning

confidence: 99%

State of the Art in Crystallization of LiNbO3 and Their Applications

et al. 2021

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Lithium niobate (LiNbO3) crystals are important dielectric and ferroelectric materials, which are widely used in acoustics, optic, and optoelectrical devices. The physical and chemical properties of LiNbO3 are dependent on microstructures, defects, compositions, and dimensions. In this review, we first discussed the crystal and defect structures of LiNbO3, then the crystallization of LiNbO3 single crystal, and the measuring methods of Li content were introduced to reveal reason of growing congruent LiNbO3 and variable Li/Nb ratios. Afterwards, this review provides a summary about traditional and non-traditional applications of LiNbO3 crystals. The development of rare earth doped LiNbO3 used in illumination, and fluorescence temperature sensing was reviewed. In addition to radio-frequency applications, surface acoustic wave devices applied in high temperature sensor and solid-state physics were discussed. Thanks to its properties of spontaneous ferroelectric polarization, and high chemical stability, LiNbO3 crystals showed enhanced performances in photoelectric detection, electrocatalysis, and battery. Furthermore, domain engineering, memristors, sensors, and harvesters with the use of LiNbO3 crystals were formulated. The review is concluded with an outlook of challenges and potential payoff for finding novel LiNbO3 applications.

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Design, fabrication and characterization of SAW devices on LiNbO3 bulk and ZnO thin film substrates

Cited by 26 publications

References 8 publications

Nonreciprocal magnetoacoustic waves with out-of-plane phononic angular momenta

Nonreciprocal magnetoacoustic waves with out-of-plane phononic angular momenta

Measurement of the electric permittivity using Bleustein–Gulyaev wave sensor

State of the Art in Crystallization of LiNbO3 and Their Applications

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