Design improvements for an electret-based MEMS vibrational electrostatic energy harvester

Altena, G.; Renaud, M.; Elfrink, R.; Goedbloed, M.H.; Nooijer, C. de; Schaijk, R. van

doi:10.1088/1742-6596/476/1/012078

Cited by 12 publications

(10 citation statements)

References 7 publications

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“…Improvement in power generation due to specific electrode geometrical configuration in an electret-based EEH is reported by Altena et al [51]. The cross-sectional view of the developed energy harvester is shown in figure 20.…”

Section: Challenges and State-of-the-art In Eehsmentioning

confidence: 79%

“…This is because of the fact that electret-based energy harvesters are generally larger in size compared with electret-free harvesters and have permanent charges (electrets) deposited on their conductive plates. On the basis of acceleration levels to which these energy harvesters are subjected, the EEHs in [16,20,37,42,43,45,48] are suitable for low acceleration (less than 1 g) vibrations, the EEHs in [36,38,40,49,51] perform well in medium acceleration (between 1 g to 5 g) environments, however, the EEHs reported in [15,30,41,44,50,52] can only operate efficiently with high acceleration (greater than 5 g) excitations. The power produced by the developed EEHs as a function of the device's active surface is shown in figure 53.…”

Section: Comparison Of the Reported Eehsmentioning

confidence: 99%

“…It is evident from the figure that, based on power per unit of active surface of the harvester, the electret-based EEH performance is far better than that of electret-free EEHs, this is attributed to the deposition of the electret as permanent charge layers in electret-based harvesters. Among all EEHs, the PPAA of the electret-based EEHs in [37,51] is high, this is due to the fact that these were subjected to relatively high acceleration levels, have better structural configuration, and, moreover, contained comparatively large proof masses.…”

Section: Comparison Of the Reported Eehsmentioning

confidence: 99%

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State-of-the-art in vibration-based electrostatic energy harvesting

Khan¹,

Qadir²

2016

J. Micromech. Microeng.

176

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Recently, embedded systems and wireless sensor nodes have been gaining importance. For operating these devices several vibration-based energy harvesters have been successfully developed and reported, such as piezoelectric, electromagnetic, and electrostatic energy harvesters (EEHs). This paper presents the state-of-the-art in the field of vibration-based EEHs. Mainly, two types of EEHs, electret-free and electret-based, are reported in the literature. The developed EEHs are mostly of the centimeter scale. These energy harvesters, with resonant frequencies ranging from 2 Hz to 1.7 kHz, when subjected to excitation on the order of 0.25 g to 14.2 g, generate power that ranges from 0.46 nW to 2.1 mW.

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Section: Challenges and State-of-the-art In Eehsmentioning

confidence: 79%

Section: Comparison Of the Reported Eehsmentioning

confidence: 99%

Section: Comparison Of the Reported Eehsmentioning

confidence: 99%

See 1 more Smart Citation

State-of-the-art in vibration-based electrostatic energy harvesting

Khan¹,

Qadir²

2016

J. Micromech. Microeng.

176

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“…Altena et al [41] in 2013 presented many improvements for an electret based electrostatic harvester. The device was initially able to generate a power output of 175 µW but after improvement with a higher resonance frequency and higher electret potential, it was capable of generating 497µW AC power, which is the highest reported power for electret based harvesters.…”

Section: Continuous Electret Based Systemsmentioning

confidence: 99%

Electrostatic Energy Harvesting Systems: A Better Understanding of Their SustainabilityElectrostatic Energy Harvesting Systems: A Better Understanding of Their Sustainability

Aljadiri¹,

Taha²,

Ivey³

2017

JOCET

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“…The structure of the harvester is described in figure 1(a) and discussed in more detail in [3,4]. It consists of a stack of three bonded wafers.…”

Section: Introductionmentioning

confidence: 99%

Shock reliability analysis and improvement of MEMS electret-based vibration energy harvesters

Renaud

Fujita

Goedbloed

et al. 2015

J. Micromech. Microeng.

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Vibration energy harvesters can serve as a replacement solution to batteries for powering tire pressure monitoring systems (TPMS). Autonomous wireless TPMS powered by microelectromechanical system (MEMS) electret-based vibration energy harvester have been demonstrated. The mechanical reliability of the MEMS harvester still has to be assessed in order to bring the harvester to the requirements of the consumer market. It should survive the mechanical shocks occurring in the tire environment. A testing procedure to quantify the shock resilience of harvesters is described in this article. Our first generation of harvesters has a shock resilience of 400 g, which is far from being sufficient for the targeted application. In order to improve this aspect, the first important aspect is to understand the failure mechanism. Failure is found to occur in the form of fracture of the device's springs. It results from impacts between the anchors of the springs when the harvester undergoes a shock. The shock resilience of the harvesters can be improved by redirecting these impacts to nonvital parts of the device. With this philosophy in mind, we design three types of shock absorbing structures and test their effect on the shock resilience of our MEMS harvesters. The solution leading to the best results consists of rigid silicon stoppers covered by a layer of Parylene. The shock resilience of the harvesters is brought above 2500 g. Results in the same range are also obtained with flexible silicon bumpers, which are simpler to manufacture.

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Design improvements for an electret-based MEMS vibrational electrostatic energy harvester

Cited by 12 publications

References 7 publications

State-of-the-art in vibration-based electrostatic energy harvesting

State-of-the-art in vibration-based electrostatic energy harvesting

Electrostatic Energy Harvesting Systems: A Better Understanding of Their SustainabilityElectrostatic Energy Harvesting Systems: A Better Understanding of Their Sustainability

Shock reliability analysis and improvement of MEMS electret-based vibration energy harvesters

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