Design, microfabrication and analysis of polysilicon thin layers for MEMS vibrating structures

Voicu, Rodica; Gavrıla, Raluca; Obreja, Cosmin; Baracu, Angela; Dinescu, Adrian; Müller, Raluca

doi:10.1007/s10470-014-0485-8

Cited by 9 publications

(2 citation statements)

References 12 publications

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“…The reason may be related to surface lattice misalignment caused by different dopants, larger atomic mismatch and slower grain growth associated with boron doped substrates. 26 The possible explanation is that during the high-temperature deposition process, a significant amount of boron atoms from the heavily doped substrate diffuse into the interior of the polysilicon film. Considering the atomic radii of boron (0.087 nm) and arsenic (0.114 nm), compared to silicon's radius of 0.112 nm, there is a significant mismatch between boron and silicon (0.22), while the mismatch between arsenic and silicon is relatively small (0.02).…”

Section: Resultsmentioning

confidence: 99%

The preparation of polysilicon films on highly boron doped silicon substrates and their effects on Cu out-diffusion

Zhang,

Zhou,

Shen

et al. 2024

RSC Adv.

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Section: Resultsmentioning

confidence: 99%

The preparation of polysilicon films on highly boron doped silicon substrates and their effects on Cu out-diffusion

Zhang,

Zhou,

Shen

et al. 2024

RSC Adv.

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“…For the micro-/nano-pattern fabrication, the photolithography [ 9 , 22 , 23 ] and the electron beam lithography (EBL) [ 17 , 24 ] are the most used techniques. EBL provides good patterning results for nanoscale features (called “direct writing technique”).…”

Section: Introductionmentioning

confidence: 99%

Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography

et al. 2021

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This study presents the design and manufacture of metasurface lenses optimized for focusing light with 1.55 µm wavelength. The lenses are fabricated on silicon substrates using electron beam lithography, ultraviolet-nanoimprint lithography and cryogenic deep reactive-ion etching techniques. The designed metasurface makes use of the geometrical phase principle and consists of rectangular pillars with target dimensions of height h = 1200 nm, width w = 230 nm, length l = 354 nm and periodicity p = 835 nm. The simulated efficiency of the lens is 60%, while the master lenses obtained by using electron beam lithography are found to have an efficiency of 45%. The lenses subsequently fabricated via nanoimprint are characterized by an efficiency of 6%; the low efficiency is mainly attributed to the rounding of the rectangular nanostructures during the pattern transfer processes from the resist to silicon due to the presence of a thicker residual layer.

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The development of sensitive graphene-based surface acoustic wave sensors for NO2 detection at room temperature

Buiculescu,

Dinu,

Veca

et al. 2024

Microchim Acta

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Bilayer graphene (Bl-Gr) and sulphur-doped graphene (S-Gr) have been integrated with LiTaO3 surface acustic wave (SAW) sensors to enhance the performance of NO2 detection at room temperature. The sensitivity of the Bl-Gr SAW sensors toward NO2, measured at room temperature, was 0.29º/ppm, with a limit of detection of 0.068 ppm. The S-Gr SAW sensors showed 0.19º/ppm sensitivity and a limit of detection of 0.140 ppm. The origin of these high sensitivities was attributed to the mass loading and elastic effects of the graphene-based sensing materials, with surface changes caused by the absorption of the NO2 molecules on the sensing films. Although there are no significant differences regarding the sensitivity and detection limit of the two types of sensors, the measurements in the presence of interferent gases and various humidity conditions outlined much better selectivity and sensing performances towards NO2 gas for the Bl-Gr SAW sensors. Graphical Abstract

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Design, microfabrication and analysis of polysilicon thin layers for MEMS vibrating structures

Cited by 9 publications

References 12 publications

The preparation of polysilicon films on highly boron doped silicon substrates and their effects on Cu out-diffusion

The preparation of polysilicon films on highly boron doped silicon substrates and their effects on Cu out-diffusion

Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography

The development of sensitive graphene-based surface acoustic wave sensors for NO2 detection at room temperature

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