Design, modeling, and control of a large range 3-DOF micropositioning stage

Al-Jodah, Ammar; Shirinzadeh, Bijan; Ghafarian, Mohammadali; Das, Tilok Kumar; Pinskier, Joshua

doi:10.1016/j.mechmachtheory.2020.104159

Cited by 36 publications

(12 citation statements)

References 44 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, differentiation has an amplification effect on noise interference, and strengthening differentiation is unfavorable to system anti-interference. PID is the most widely used control algorithm, which is relatively simple and easy to understand, but the adjustment of PID parameters often requires trial and error, and the effect of PID control algorithm is not ideal in the face of most nonlinear systems [1] . The PID control system block diagram is given in Fig.…”

Section: Research and Comparison Of Control Algorithms 11 Pid Control...mentioning

confidence: 99%

Research on high precision control algorithm

Hanlin,

2023

AOPC 2023: Laser Technology and Applications; And Optoelectronic Devices and Integration

View full text Add to dashboard Cite

Section: Research and Comparison Of Control Algorithms 11 Pid Control...mentioning

confidence: 99%

Research on high precision control algorithm

Hanlin,

2023

AOPC 2023: Laser Technology and Applications; And Optoelectronic Devices and Integration

View full text Add to dashboard Cite

“…Due to complex mechanical structures, 3-DoF parallel nanopositioning stages are far less than 2-DoF ones in quantity. [14][15][16][17] Also, their performances need to be improved (i.e. making displacement amplification ratios greater than 8 and first-order response frequency higher than 300 Hz).…”

Section: Introductionmentioning

confidence: 99%

Design and disturbance rejection control of a piezoelectric nanopositioning stage

Yang

et al. 2023

Proceedings of the Institution of Mechanical Engineers, Part C:

View full text Add to dashboard Cite

The article covers structural design and disturbance rejection control of a flexure-based compliant piezoelectric nanopositioning stage. The stage is devised using four-bar amplification mechanisms, auxiliary guiding mechanisms, and a compound parallelogram mechanism. Static and dynamic models of compliant mechanisms are analyzed based on a compliance matrix method. A modified Prandtl-Ishlinskii (PI) model with dead zone operators is used to describe the asymmetric hysteresis. Then, a global electromechanical dynamic model is built and identified. A comprehensive disturbance rejection controller (CDRC) combining a robust H∞ control and a disturbance observer-based (DOB) control is proposed for high trajectory tracking accuracy and anti-disturbance performance. The trajectory tracking accuracy of the stage can be up to 3 nm in experiments. As amplitudes of reference signals increases, relative tracking errors gradually decrease. System instability and oscillation caused by strong external disturbances are also reduced. Experimental results prove the effectiveness of the developed CDRC.

show abstract

“…Although an extensive amount of research has already been done in the area of compliance or stiffness analysis [3,4,[14][15][16][17], most of these study deal with the case of planar mechanisms or in applications involving planar motions. There is not much work available for spatial mechanisms having multiple degree-of-freedom (DOF).…”

Section: Introductionmentioning

confidence: 99%

Compliance modeling of a full 6-DOF series–parallel flexure-based Stewart platform-like micromanipulator

Mishra

Kumar

2022

Robotica

View full text Add to dashboard Cite

With many micromanipulator designs emerging in micro and nanosystem applications, the element of compliance in the mechanisms is gaining attention. Several designs consider motions limited in a plane for high accuracy and repeatability as needed in micro/nano manipulation applications. Extending this to a full spatial configuration with coupled motions of series and parallel linkages with flexure joints of 1-degree-of-freedom (DOF) and 3-DOF needs a systematic analytical approach. One such approach for compliance analysis is presented in this article for a mechanism designed at Indian Institute of Technology Kharagpur. To validate the analytical models, finite element analysis simulations are performed with the help of the Abaqus-6.14 software package. Following the successful validation, the effect of structural parameters on the performance is presented with the help of the analytical expressions. We explore the performance of the mechanism with different dimensions of flexures of a particular type. Results indicate that the design with dissimilar dimensional parameters can give superior performance.

show abstract

Design, modeling, and control of a large range 3-DOF micropositioning stage

Cited by 36 publications

References 44 publications

Research on high precision control algorithm

Research on high precision control algorithm

Design and disturbance rejection control of a piezoelectric nanopositioning stage

Compliance modeling of a full 6-DOF series–parallel flexure-based Stewart platform-like micromanipulator

Contact Info

Product

Resources

About