Design, Modeling, and FPAA-Based Control of a High-Speed Atomic Force Microscope Nanopositioner

Yong, Yuen Kuan; Bhikkaji, Bharath; Moheimani, S. O. Reza

doi:10.1109/tmech.2012.2194161

Cited by 126 publications

(80 citation statements)

References 45 publications

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“…All these designs can realize the micro/nano structure scratching, but they also have obvious drawbacks, such as the overlarge normal load in Lee"s mechanism, the residual friction of the probe shaft in Jeong"s design, and the limitation of machining width in Gozen"s system. As to the position precision in xy plane, the piezo-actuated flexure-mechanism is a good choice to solve this problem, which has been studied by many scholars [22][23][24][25].…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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Based on the self-developed three dimensional micro/nano machining system, the effects of machining parameters and sample material on micro/nano machining are investigated. The micro/nano machining system is mainly composed of the probe system and micro/nano positioning stage. The former is applied to control the normal load and the latter is utilized to realize high precision motion in the xy plane. A sample examination method is firstly introduced to estimate whether the sample is placed horizontally. The machining parameters include scratching direction, speed, cycles, normal load and feed. According to the experimental results, the scratching depth is significantly affected by the normal load in all four defined scratching directions but is rarely influenced by the scratching speed. The increase of scratching cycle number can increase the scratching depth as well as smooth the groove wall. In addition, the scratching tests of silicon and copper attest that the harder material is easier to be removed. In the scratching with different feed amount, the machining results indicate that the machined depth increases as the feed reduces. Further, a cubic polynomial is used to fit the experimental results to predict the scratching depth. With the selected machining parameters of scratching direction d3/d4, scratching speed 5μm/s and feed 0.06μm, some more micro structures including stair, sinusoidal groove, Chinese character "田", "TJU" and Chinese panda have been fabricated on the silicon substrate.

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Section: Introductionmentioning

confidence: 99%

Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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“…A high-speed XYZ flexure-guided nanopositioner, described in [28] and [43] and pictured in Fig. 3, is used to implement the video-rate Lissajous scans in a commercial AFM.…”

Section: Methodsmentioning

confidence: 99%

Video-Rate Lissajous-Scan Atomic Force Microscopy

Yong

Bazaei

Moheimani

2014

IEEE Trans. Nanotechnology

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Abstract-Raster scanning is common in atomic force microscopy (AFM). The nonsmooth raster waveform contains highfrequency content that can excite mechanical resonances of an AFM nanopositioner during a fast scan, causing severe distortions in the resulting image. The mainstream approach to avoid scan-induced vibrations in video-rate AFM is to employ a highbandwidth nanopositioner with the first lateral resonance frequency above 20 kHz. In this paper, video-rate scanning on a nanopositioner with 11.3-kHz resonance frequency is reported using a smooth Lissajous scan pattern. The Lissajous trajectory is constructed by tracking two sinusoidal waveforms on the lateral axes of the nanopositioner. By combining an analog integral resonant controller (IRC) with an internal model controller, 1-and 2-kHz single tone set-points were successfully tracked. Highquality time lapsed AFM images of a calibration grating recorded at 9 and 18 frames/s without noticeable image distortions are reported.Index Terms-Atomic force microscopy, flexure-based, integral resonant control, internal model control, Lissajous-scan, nonraster scanning, video-rate.

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“…Note that (30) has one more equivalent form and (32) has two more equivalent forms [27], which should be chosen to either optimize the speed or the stability of the numerical computations. In this case, (32) was chosen such that the property of symmetry and positive definiteness of the covariance matrix is not lost during computations.…”

Section: Discrete Kalman Filter a Single Frequencymentioning

confidence: 99%

A Kalman Filter for Amplitude Estimation in High-Speed Dynamic Mode Atomic Force Microscopy

Ruppert

Karvinen

Wiggins

et al. 2016

IEEE Trans. Contr. Syst. Technol.

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A fundamental challenge in dynamic mode atomic force microscopy (AFM) is the estimation of the cantilever oscillation amplitude from the deflection signal, which might be distorted by noise and/or high-frequency components. When the cantilever is excited at resonance, its deflection is typically obtained via narrow-band demodulation using a lock-in amplifier (LIA). However, the bandwidth of this measurement technique is ultimately bounded by the low-pass filter, which must be employed after demodulation to attenuate the component at twice the carrier frequency. Furthermore, to measure the amplitude of multiple frequency components, such as higher eigenmodes and/or higher harmonics in multifrequency AFM, multiple LIAs must be employed. In this paper, the authors propose the estimation of amplitude and phase using a linear time-varying Kalman filter that is easily extended to multiple frequencies. Experimental results are obtained using square-modulated sine waves and closed-loop AFM scans, verifying the performance of the proposed Kalman filter. IndexTerms-Amplitude estimation, atomic force microscopy (AFM), field-programmable gate array (FPGA) implementation, high bandwidth, Kalman filter, state estimation.

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Design, Modeling, and FPAA-Based Control of a High-Speed Atomic Force Microscope Nanopositioner

Cited by 126 publications

References 45 publications

Experimental investigation of the tip based micro/nano machining

Experimental investigation of the tip based micro/nano machining

Video-Rate Lissajous-Scan Atomic Force Microscopy

A Kalman Filter for Amplitude Estimation in High-Speed Dynamic Mode Atomic Force Microscopy

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