Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

Abstract

This study designs and characterizes a novel precise measurement system for simultaneously measuring six-degree-of-freedom geometric motion errors of a long linear stage of a machine tool. The proposed measurement system is based on a method combined with the geometrical optics method and laser interferometer method. In contrast to conventional laser interferometers using only the interferometer method, the proposed measurement system can simultaneously measure six-degree-of-freedom geometric motion errors of a long linear stage with lower cost and faster operational time. The proposed measurement system is characterized numerically using commercial software ZEMAX and mathematical modeling established by using a skew-ray tracing method, a homogeneous transformation matrix, and a first-order Taylor series expansion. The proposed measurement system is then verified experimentally using a laboratory-built prototype. The experimental results show that, compared to conventional laser interferometers, the proposed measurement system better achieves the ability to simultaneously measure six-degree-of-freedom geometric errors of a long linear stage (a traveling range of 250 mm).

Simultaneous Measurement of 6DOF Motion Errors of Linear Guides of CNC Machine Tools Using Different Modes

“…Relevant commercial interferometers produced by Renishaw, Keysight and JENAer are mostly used for single parameter measurement. With the increasing requirements for measurement efficiency, multiparameter simultaneous measurement systems based on the principle of laser collimation [ 7 , 8 , 9 , 10 ] or the combination of collimation and interference [ 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 ] continue to emerge, and have become the current research trend. Although, multiparameter simultaneous measurement systems have improved efficiency compared to single-parameter measurement systems, in actual measurement, it is often necessary to adjust the installation positions of the measurement head and the target mirror according to the machine tool types.…”

“…Generally, there are two installation methods for the measurement system, such as mounting the measurement head on the tripod and the target mirror on the worktable or spindle [ 17 ]. Another installation method is to install the measurement head and the target mirror on the worktable and the spindle, respectively.…”

“…However, based on this installation method, there are two different measurement modes in the measurement process due to the different types of machine tools. In general, the default measurement mode is the fixed measurement head, and the target mirror moves with the worktable or spindle [ 9 , 10 , 13 , 17 , 18 , 21 ]. This measurement mode is called measurement mode 1 in this paper.…”

Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages

“…Teng et al [31] and Wen et al [32] established an interferometer measurement model that considers the orientation errors of reflector mirrors to compensate the result errors of the measurement system of the ultraprecision motion platform. By analyzing laser ray paths affected by linear and angular errors of interferometers and optics, Liu et al [33] developed a 6-DOF geometric error measurement method for a long linear stage.…”

Design and Characterisation of a Fast Steering Mirror Compensation System Based on Double Porro Prisms by a Screw-Ray Tracing Method

“…There are certain studies which mention that the intensity fluctuations of the laser source are related to the input current [ 8 ], while the environmental conditions (e.g., atmospheric), vibrations and thermally-induced motion may cause the laser to misalign [ 9 ]. The laser source drift contains two DOF angular errors and two DOF displacement errors, although even a small angular error will be magnified by the optical path length and reduce the quality of the product [ 10 , 11 ]. Therefore, it is necessary to improve the laser point stability.…”