Design of a Micro Multi-Axis Force-Moment Sensor

Dzung, Dao Viet; Toriyama, Toshiyuki; Wells, John C.; Saito, Susumu

doi:10.1541/ieejsmas.122.35

Cited by 3 publications

References 13 publications

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Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology

Dao

Nakamura

Thanh

et al. 2010

Adv. Nat. Sci: Nanosci. Nanotechnol.

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MEMS (micro-electro-mechanical systems) technology has undergone almost 40 years of development, with significant technology advancement and successful commercialization of single-functional MEMS devices, such as pressure sensors, accelerometers, gyroscopes, microphones, micro-mirrors, etc. In this context of MEMS technology, this paper introduces our studies and developments of novel micro/nano-mechanical sensors and actuators based on silicon- on-insulator (SOI)-MEMS technology, as well as fundamental research on piezoresistive effects in single-crystal silicon nanowires (SiNWs). In the first area, novel mechanical sensors, such as 6-DOF micro-force moment sensors, multi-axis inertial sensors and micro-electrostatic actuators developed with SOI-MEMS technology will be presented. In the second area, we have combined atomic-level simulation and experimental evaluation methods to explain the giant piezoresistive effect in single crystalline SiNWs along different crystallographic orientations. This discovery is significant for developing more highly sensitive and miniaturized mechanical sensors in the near future.

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Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology

Dao

Nakamura

Thanh

et al. 2010

Adv. Nat. Sci: Nanosci. Nanotechnol.

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Development of six-degree of freedom micro force sensor for application in geophysics

Dao

Toriyama

Wells

et al.

Proceedings of IEEE Sensors

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A multi-axis force-moment micro sensor for application in fluid mechanics

Dao

Nguyen

et al.

Proceedings of 2002 International Symposium on Micromechatronics and Human Science

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This paper presents the development of a six-degree of freedom (6-DOF) force moment sensor utilizing the piezoresistive effects in silicon. The proposed sensor can independently detect six components of force and moment on a test particle in a turbulent flow. By combining p-type conventional and shear piezoresistors in Si (111), and arranging them suitably on the sensing area, the total number of piezoresistors used in this sensing chip is only eighteen, much fewer than that of the prior art piezoresistive 6-DOF force sensors [l], [2]. Calibration for six components of force versus output voltages was completed.The sensitivities are linear, close to the design values. Preliminary results of measurement of forces and moments acting on a test particle in turbulent flow will be presented.

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Design of a Micro Multi-Axis Force-Moment Sensor

Cited by 3 publications

References 13 publications

Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology

Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology

Development of six-degree of freedom micro force sensor for application in geophysics

A multi-axis force-moment micro sensor for application in fluid mechanics

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