“…Microelectromechanical system (MEMS)-based piezoresistive pressure sensors have wide applications in industrial construction [ 1 , 2 , 3 , 4 ], healthcare monitoring [ 5 , 6 , 7 , 8 , 9 , 10 , 11 ], and ocean depth detection due to their high process maturity, easy sensor integration, and easy signal processing [ 12 , 13 ]. However, systematic research of the sensor performance in harsh environments is lacking, although many studies have been reported on the design and manufacturing of such piezoresistive pressure sensors.…”