Design of a Novel Microwave Plasma Source Based on Ridged Waveguide

Deng, Pingping; Xiao, Wei; Wang, Fengxia; Zhang, and Zhengping

doi:10.2528/pierl21082501

Cited by 2 publications

(2 citation statements)

References 22 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Finally, the plasma is generated using the induced electric field formed inside the reactor. The MWP can be classified as electron cyclotron plasma and surface-wave sustained plasma [2,3,[21][22][23][24]. In electron cyclotron plasma, all free electrons rotate with the same frequency (electron cyclotron frequency: ECF) in a strong magnetic field.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Review of Plasma Processing for Polymers and Bio-Materials Using a Commercial Frequency (50/60 Hz)-Generated Discharge

et al. 2023

View full text Add to dashboard Cite

This manuscript introduces the properties and diverse applications of plasma generated using commercial frequencies of 50/60 Hz. Commercial frequency (CF) derived plasma exhibits characteristics similar to DC discharge but with an electrical polarity and a non-continuous discharge. Due to the low-frequency nature, the reactor configurations usually are capacitively coupled plasma type. The advantages of this method include its simple power structure, low-reaction temperature, and low substrate damage. The electrical polarity can prevent charge buildup on the substrates and deposited films, thereby reducing substrate damage. The simple, low-cost, and easy-to-operate power structure makes it suitable for laboratory-scale usage. Additionally, the various applications, including plasma-enhanced vapor deposition, sputtering, dielectric barrier discharge, and surface modification, and their outcomes in the CF-derived plasma processes are summarized. The conclusion drawn is that the CF-derived plasma process is useful for laboratory-scale utilization due to its simplicity, and the results of the plasma process are also outstanding.

show abstract

Section: Introductionmentioning

confidence: 99%

“…The resonating effect heats many electrons and generates a plasma discharge [21], as shown in Figure 1c. In surface-wave sustained plasma, the discharge is generated via the propagation of electromagnetic surface waves [22][23][24], as shown in Figure 1d. Table 1 shows a summary of plasma parameters at different plasmagenerating methods.…”

Section: Introductionmentioning

confidence: 99%

Review of Plasma Processing for Polymers and Bio-Materials Using a Commercial Frequency (50/60 Hz)-Generated Discharge

et al. 2023

View full text Add to dashboard Cite

show abstract

A high-performance microwave plasma source employing dielectric wedges

Yang,

Zhang,

Huang

et al. 2024

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

The microwave-to-plasma energy conversion efficiency and the ease of plasma self-ignition are critical factors affecting the applications for microwave plasma sources (MPS). This study presents a novel MPS utilizing dielectric wedges for self-ignition and improved energy conversion. Firstly, we crafted a dielectric wedge with a gradient refractive index, guiding the electric field from air to dielectric materials and facilitating microwave propagation along the dielectric in a waveguide. Through electromagnetic simulation, we explored how the size and permittivity of the dielectric wedge affect the electric field distribution. Then, the MPS based on the dielectric wedge was designed. In this configuration, a dielectric tube encloses the discharge tube, connecting to dielectric wedges to guide electromagnetic waves to the plasma. We analyzed the MPS performance using the Drude model, evaluating microwave energy conversion efficiency across various electron densities and collision frequencies. The results were compared with a commonly used MPS based on a tapered waveguide, demonstrating the proposed MPS has wider applicability across different operation conditions. Finally, experiments under low pressures were conducted using various gases, showing an average energy conversion efficiency of approximately 40% higher than the tapered waveguide MPS. The experiments also indicate the proposed MPS has a greater capability of self-ignition at lower power levels. These findings highlight the efficacy of incorporating dielectric wedges to enhance MPS performance, making it conducive for broader industrial applications.

show abstract

Design of a Novel Microwave Plasma Source Based on Ridged Waveguide

Cited by 2 publications

References 22 publications

Review of Plasma Processing for Polymers and Bio-Materials Using a Commercial Frequency (50/60 Hz)-Generated Discharge

Review of Plasma Processing for Polymers and Bio-Materials Using a Commercial Frequency (50/60 Hz)-Generated Discharge

A high-performance microwave plasma source employing dielectric wedges

Contact Info

Product

Resources

About