Design of BST-on-Si composite FBARs for switchable BAW filter application

Koohi, Milad Zolfagharloo; Lee, Seung Ku; Mortazawi, Amir

doi:10.1109/eumc.2016.7824515

Cited by 9 publications

(3 citation statements)

References 11 publications

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“…COMSOL Multiphysics piezoelectric simulations are performed to verify the overall k 2 ef f for multilayer bulk acoustic wave resonators with half wavelength thickness per layer in Section II-D. PZ1 and PZ2 are two examples of piezoelectric materials with parameters within the reasonable range of the first principle predictions of scandium-doped aluminum nitride of different Sc concentrations of 0 % and 40 % [24]. BST parameters are close to parameters obtained from previously fabricated devices [25]. Other parameters are obtained from the COMSOL material library.…”

Section: F Validation Of Calculation Proceduresmentioning

confidence: 81%

Electrode Effects in mmWave Frequency Multilayer Bulk Acoustic Wave Resonators

Peng¹

2023

Preprint

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<p>Electrodes are present in acoustic resonators to set electrical boundary conditions. Electrodes are acoustically part of a bulk acoustic wave (BAW) resonator that affect both its electromechanical coupling coefficient and its quality factor. In this work, layer thicknesses and material constants in each layer are used to calculate the series and parallel resonance frequencies. For half wavelength per layer structures, a closed-form expression for electromechanical coupling coefficient from material constants is obtained to facilitate the observation of the electromechanical coupling coefficient effects of electrodes. Thermoelastic damping (TED) has been identified as the dominant acoustic loss mechanism in conductors. In this work, the complex wavenumber is calculated based on the unified theory of thermoelasticity to incorporate acoustic loss due to the interaction between elastic deformation and heat flow. Acoustic quality factors due to TED for common metals in microelectromechanical systems (MEMS) processing are calculated to facilitate the observation of the quality factor effects of electrodes. It is observed that there exists a tradeoff among electromechanical coupling coefficient, acoustic quality factor, and electrical conductivity in the selection of electrode metals.</p>

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Section: F Validation Of Calculation Proceduresmentioning

confidence: 81%

Electrode Effects in mmWave Frequency Multilayer Bulk Acoustic Wave Resonators

Peng¹

2023

Preprint

View full text Add to dashboard Cite

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“…COMSOL Multiphysics piezoelectric simulations are performed to verify the overall k 2 t for multilayer bulk acoustic wave resonators with half wavelength thickness per layer in Section II-E. PZ1 and PZ2 are two examples of piezoelectric materials with parameters within the reasonable range of the first principle predictions of scandium doped aluminum nitride of different Sc concentrations of 0 % and 40 % [22]. BST parameters are close to parameters obtained from previously fabricated devices [23]. Other parameters are obtained from the COMSOL material library.…”

Section: G Validation Of Calculation Proceduresmentioning

confidence: 83%

“…With a Helmholtz free energy F (ε ij , T, T ,i ), (23) can be written as (24) should hold for all rates, and hence the coefficients in front of the εij , Ṫ , and Ṫ,i must vanish:…”

Section: A Complex Propagation Constant From Thermoelasticitymentioning

confidence: 99%

Electrode Effects in mmWave Frequency Multilayer Bulk Acoustic Wave Resonators

Peng¹

2023

Preprint

View full text Add to dashboard Cite

<p>Electrodes are present in acoustic resonators to set electrical boundary conditions. Electrodes are acoustically part of a bulk acoustic wave (BAW) resonator that affect both its electromechanical coupling coefficient and its quality factor. Calculation of electromechanical coupling coefficient in multilayer structures requires the analysis of a system of equations relating the waves inside each layer to those in its adjacent layers. In this work, layer thicknesses and material constants in each layer are used to calculate the series and parallel resonance frequencies. Due to the proximity in frequency of series and parallel resonance, a series expansion of the series resonance frequency equation is performed around the parallel resonance frequency, and a closed form expression for electromechanical coupling coefficient from material constants and layer thicknesses is obtained to facilitate the observation of the electromechanical coupling coefficient effects of electrodes. Thermoelastic damping (TED) has been identified as the dominant acoustic loss mechanism in conductors. In this work, the complex wavenumber is calculated based on the unified theory of thermoelasticity to incorporate acoustic loss due to the interaction between elastic deformation and heat flow. Acoustic quality factors due to TED for common metals in microelectromechanical systems (MEMS) processing are calculated to facilitate the observation of the quality factor effects of electrodes. It is observed that there exists tradeoff among electromechanical coupling coefficient, acoustic quality factor, and electrical conductivity in the selection of electrode metals.</p>

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