Design of EBIS for nanoprocesses using HCI

Sakurai, Minoru; Nakajima, Fumiharu; Fukumoto, Takunori; Nakamura, Nobuyuki; Ohtani, S.; Mashiko, Shinro

doi:10.1088/1742-6596/2/1/007

Cited by 8 publications

(3 citation statements)

References 6 publications

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“…The design and performance of the EBIS is described elsewhere [9,10]. The electron beam (16keV, 80mA) was compressed in the drift tube of the EBIS by 3T magnetic field generated by a superconducting magnet cooled by a closed-cycle refrigerator.…”

Section: Methodsmentioning

confidence: 99%

SEM contrast of solid surfaces irradiated with highly charged ions

Sakurai

Onishi

Asakura

et al. 2011

Trans. Mat. Res. Soc. Japan

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We have observed secondary electron microscope (SEM) images of the surfaces of Si with native oxide layers and highly oriented pyrolytic graphite (HOPG) irradiated with highly charged ions (HCIs, Ar 11+ ) produced by an electron beam ion source at the fluence in the order of 10 13~1 0 14 /cm 2 . The contrast of SEM image changes brighter at irradiated areas for graphite surfaces, while the contrast for the Si surface become darken at irradiated areas. The SEM contrast between irradiated and unirradiated areas is understood in terms of the voltage contrast mechanism in the interpretation of SEM images.When the strength of the contrasts is roughly compared with the sample irradiated with singly charged ions (SCIs), HCI has 100 times higher efficiency for the production of SEM contrast than SCI. The high efficiency reflects the nature of interaction between HCI and surface.

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Section: Methodsmentioning

confidence: 99%

SEM contrast of solid surfaces irradiated with highly charged ions

Sakurai

Onishi

Asakura

et al. 2011

Trans. Mat. Res. Soc. Japan

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“…The detail of design and performance is described elsewhere [5]. The other is an electron beam ion source (EBIS) recently developed at Kobe University, which is designed for the application of ion beam processing of materials so that it is constructed and operated easily without demanding expertise of EBIS using a separate, commercially available super-conducting (SC) magnet [6]. Maximum values of electron beam energy and electron current are 40keV and 300mA, respectively.…”

Section: Introductionmentioning

confidence: 99%

“…We note on improvements performed on the design structure shown in the earlier publications [6][7][8] in order to achieve target specifications. We found some errors in the calculation of magnetic field distribution, which revealed magnetic shields at electron gun and collector did not function sufficiently, then the electron gun was moved away from the SC magnet by 9cm and the magnetic shield at collector was reconstructed with thicker shield structure and stronger ceramic supports.…”

Section: Introductionmentioning

confidence: 99%

Nano-scale surface modification of materials with slow, highly charged ion beams

Sakurai

Tona

Takahashi

et al. 2007

Nuclear Instruments and Methods in Physics Research Section B:

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Some results on surface modification of Si and graphite with highly charged ions (HCIs) are presented. Modified surfaces were observed using scanning tunneling microscopy. Crater-like structure with a diameter in nm region is formed on a Si(111)-(7x7) surface by the incidence of a single HCI. The protrusion structure is formed on a highly oriented pyrolytic graphite surface on the other hand, and the structure becomes an active site for molecular adsorption. A new, intense HCI source and an experimental apparatus are under development in order to process and observe aligned nanostructures created by the impact of collimated HCI beam.

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