2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278)
DOI: 10.1109/mwsym.2002.1012118
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Design of inductors in organic substrates for 1-3 GHz wireless applications

Abstract: High Q inductors with maximum quality factors in the range of 180-60 have been obtained at frequencies in the 1-3 GHz band for inductances in the range of 1nH to 20nH using a low-temperature organic laminate build-up process. This is the first time such high Q inductors have been demonstrated in this technology. The different inductor designs, optimization schemes, and trade-offs between different topologies, have been discussed in this paper.

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Cited by 24 publications
(18 citation statements)
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“…It is also limited to large area manufacturing. Thus, several studies have been performed to realize the embedded inductors onto organic substrates due to their advantages such as low cost fabrication, large area manufacturing, and system level packaging [8]- [10]. However, these inductors are limited to use in the advanced electronic products with small size/volume, low profile, and high packaging density since they have been fabricated on the first layer of the organic substrate at which IC chips, sensors, and other devices are placed and assembled.…”
Section: Introductionmentioning
confidence: 99%
“…It is also limited to large area manufacturing. Thus, several studies have been performed to realize the embedded inductors onto organic substrates due to their advantages such as low cost fabrication, large area manufacturing, and system level packaging [8]- [10]. However, these inductors are limited to use in the advanced electronic products with small size/volume, low profile, and high packaging density since they have been fabricated on the first layer of the organic substrate at which IC chips, sensors, and other devices are placed and assembled.…”
Section: Introductionmentioning
confidence: 99%
“…Several techniques for fabricating planar transformer using standard CMOS RF IC technology have been developed, including using highly resistive substrate or thick low-K dielectrics film (Arshak 1999;Dalmia et al 2002;Wu et al 2000;Yoon et al 1999). In term of micromachining techniques, metal ground shield (Jiang et al 2002), thick metal traces (Yue and Wong 1998), thick oxide and suspended coil spiral over silicon trench (Ribas et al 2000;Jiang et al 2000) and out of plane coil structure (Jolic et al 2003) have been used to reduce the parasitic effects.…”
Section: Introductionmentioning
confidence: 99%
“…Variants of this design schematic have been. demonstrated in [2,3,7,and 91. This paper further extends by adding lowpass filter elements at the input and output to achieve high attenuation at the second harmonic and third harmonic of the center frequency.…”
Section: Design Of Filtersmentioning
confidence: 99%
“…Using the resonant property of lumped capacitors C1 and C2, which resonate with parasitic inductances LC1 and LC2 respectively, could also do this. For simplicity the only parasitic [7,8,12,and 131 by the authors were used as the guidelines for the design of stand alone components. Inductors in the range of 1nH-lOnH [7,8] can be embedded in stripline, CPW, microstrip or a combination of the above with Qs in the range of 30-200 based on the topology and configuration used.…”
Section: Design Of Filtersmentioning
confidence: 99%
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