Design of Miniature Electromagnetic Induction Type MEMS Generators With Multilayer Ceramic Circuit

Abstract

This paper discusses the design of a miniature electromagnetic induction type air turbine generator with a multilayer ceramic magnetic circuit. The air turbine is fabricated using a micro electro mechanical systems (MEMS) process, which can form high-accuracy, high-aspect-ratio parts. The magnetic circuit is fabricated using a multilayer ceramic technology that can form a three-dimensional conductor pattern into which a magnetic material can be introduced. By combining these technologies, a miniature generator comprising a miniature magnetic circuit with a helical conductor structure and magnetic core is achieved. In this study, a three-phase and a single-phase generator were fabricated, which produced rotational motion and output waveforms. In this paper, the generators are discussed with respect to the rotational motion and the shape of the magnetic circuit.