Although several types of locomotive microrobots have been developed, most of them have difficulty locomoting on uneven surfaces. Thus, we have been focused on microrobots that can locomote using step patterns. We are studying insect-type microrobot systems. The locomotion of the microrobot is generated by rotational movements of the shape memory alloy-type rotary actuator. In addition, we have constructed artificial neural networks by using analog integrated circuit (IC) technology. The artificial neural networks can output the driving waveform without using software programs. The shape memory alloy-type rotary actuator and the artificial neural networks are constructed with silicon wafers; they can be integrated by using micro-electromechanical system (MEMS) technology. As a result, the MEMS microrobot system can locomote using step patterns. The insect-type MEMS microrobot system is 0.079 g in weight and less than 5.0 mm in size, and its locomotion speed is 2 mm/min. The locomotion speed is slow because the heat of the shape memory alloy conducts to the mechanical parts of the MEMS microrobot. In this paper, we discuss a new rotary actuator compared with the previous model and show the continuous rotation of the proposed rotary actuator.

In this paper, we presented the 4.0, 2.7, 2.5 mm, width, length, height size biomimetics micro robot system which was inspired by insects. The micro robot system was made from silicon wafer fabricated by micro electro mechanical systems (MEMS) technology. The mechanical system of the robot was equipped with small size rotary type actuators, link mechanisms and six legs to realize the insect‐like switching behaviour. In addition, we constructed the active hardware neural networks (HNN) by analogue CMOS circuits as a locomotion controlling system. The HNN utilized the pulse‐type hardware neuron model (P‐HNM) as a basic component. The HNN outputs the driving pulses using synchronization phenomena such as biological neural networks. The driving pulses can operate the actuators of the biomimetics micro robot directly. Therefore, the HNN realized the robot control without using any software programs or A/D converters. The micro robot emulated the locomotion method and the neural networks of an insect with rotary type actuators, link mechanisms and HNN. The micro robot performed forward and backward locomotion, and also changed direction by inputting an external trigger pulse. The locomotion speed was 26.4 mm/min when the step width was 0.88 mm

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Hexapod locomotive Micro-Electro Mechanical Systems (MEMS) microrobot with Pulse-type Hardware Neural Networks (P-HNN) locomotion controlling system is presented in this chapter. MEMS microrobot is less than 5 mm width, length, and height in size. MEMS microrobot is made from a silicon wafer fabricated by micro fabrication technology to realize the small size mechanical components. The mechanical components of MEMS microrobot consists of body frames, legs, link mechanisms, and small size actuators. In addition, MEMS microrobot has a biologically inspired locomotion controlling system, which is the small size electrical components realized by P-HNN. P-HNN generates the driving pulses for actuators of the MEMS microrobot using pulse waveform such as biological neural networks. The MEMS microrobot emulates the locomotion method and the neural networks of an insect with small size actuator, link mechanisms, and P-HNN. As a result, MEMS microrobot performs hexapod locomotion using the driving pulses generated by P-HNN.