Design of Ni Mold for Discrete Track Media

Ichikawa, Kimihisa; Usa, Toshihiro; Nishimaki, K.; Usuki, Kazuyuki

doi:10.1109/tmag.2008.2002414

Cited by 6 publications

(3 citation statements)

References 7 publications

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“…A Ni stamper had line-and-space patterns with a ridge width of 30 nm, a depth of 58 nm, and pitches of 90 nm, 120 nm, 150 nm, 200 nm, and 320 nm, i.e., trench widths of 60 nm, 90 nm, 120 nm, 170 nm, and 290 nm, respectively. The shape of these patterns has been described in detail in the previous work [13]. The materials used were polycarbonate (PC, AD-5503; Teijin Chemicals Ltd.; glass transition temperature (T g ): 145 °C) and cycloolefin polymer (COP, ZENOR1060R; ZEON CORPORATION; T g : 100 °C).…”

Section: Methodsmentioning

confidence: 99%

Injection Compression Molding of Replica Molds for Nanoimprint Lithography

Nagato

2014

Polymers

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As a breakthrough in the cost and durability of molds for nanoimprint lithography (NIL), replica molds are fabricated by injection compression molding (ICM). ICM is commonly used for optical disks such as DVDs or Blu-ray disks and is also a practical fabrication method for nanostructures. In this paper, I successfully demonstrated the fabrication of cycloolefin polymer replica molds with structures smaller than 60 nm by ICM. Furthermore, ultraviolet (UV)-NIL using these replica molds was demonstrated. UV-cured resist was replicated over an area of 60 mm diameter. The degree of replication by UV-NIL in the first usage of each replica mold had good repeatability. Because ICM is a high-throughput, low-cost process, the replica mold can be disposed of after a certain time for UV-NIL. This method leads to a high-integrity UV-NIL process of patterned media because multiple large-area replica molds can be fabricated simultaneously.

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Section: Methodsmentioning

confidence: 99%

Injection Compression Molding of Replica Molds for Nanoimprint Lithography

Nagato

2014

Polymers

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“…Experiments xperiments xperiments xperiments Master media that were used in this experiment were made of FeCo film (Co 30 at.%, Ms = 1900 emu/cm 3 , Hc = 70 Oe, µ= 100) sputtered onto patterned Ni substrate, which was fabricated by EB lithography, sputtering and electroplating techniques 4), 5) . The thickness of the FeCo film is 0.1 µm.…”

Section: E E Ementioning

confidence: 99%

Analysis of Waveform from Magnetic Printed Perpendicular Hard Disk

et al. 2009

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“…15) In contrast, metallic molds, especially Ni, have advantages in hardness and abrasion resistance, and thus have been investigated as alternatives to Si. 16) However, there is still a technological challenge in making extremely fine 3D Ni molds below 100 nm. The most studied fabrication process for Ni molds consists of 1) making 3D patterns on the resist film coated on the Si wafer by electron beam lithography (e-beam lithography), which works as a master mold, 2) forming a thin Ni layer on the 3D resist by electroless plating, working as a seed layer for subsequent electroplating, 3) filling the patterns by electroplating, and 4) delaminating the Ni mold from the master mold.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Ni mold for nanoimprint lithography by combining two supercritical fluid-based deposition technologies

Momose¹,

Kawada²,

Shimogaki³

2015

Jpn. J. Appl. Phys.

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Hollow-core toroidal micro-cavities are obtained by self-rolling of double-layer (polyvinyl pyridine/polystyrole) polymer films. Rolling of the bilayer is due to preferential swelling of polyvinyl pyridine in water solution of dodecyl benzene sulfonic acid. The tube formation proceeds from a circular opening in the film made by photolithography or by mechanical scratching. Toroid equilibrium dimensions are determined by the balance of the elastic energy relaxation via the film scrolling and the work of the in-plane stretching that is due to increasing radius of the toroid. The principle features of the micro-toroid formation process are captured by a simple analytical model. The inner walls of the cavities can be made metal coated. For this aim, the polymer bilayer can be metallized by vacuum sputtering prior to lithographic patterning and rolling of the bilayer. The toroids with metallic inner surfaces are promising for the future research as IR-frequency range resonators.

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Design of Ni Mold for Discrete Track Media

Cited by 6 publications

References 7 publications

Injection Compression Molding of Replica Molds for Nanoimprint Lithography

Injection Compression Molding of Replica Molds for Nanoimprint Lithography

Analysis of Waveform from Magnetic Printed Perpendicular Hard Disk

Fabrication of Ni mold for nanoimprint lithography by combining two supercritical fluid-based deposition technologies

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