Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers

Isobe, Aki; Kamada, Y.; Oshima, Takashi; Furubayashi, Yuki; Sakuma, Noriyuki; Takubo, C.; Tainaka, Yasushi; Watanabe, K.; Sekiguchi, Toshio

doi:10.1109/icsens.2018.8589945

Cited by 3 publications

(2 citation statements)

References 11 publications

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“…To achieve high resolution, different noise sources were addressed by different means. To generate high Q and reduce the Brownian noise, specially designed two-sized perforations were fabricated in the device and substrate layers of the proof mass, in which the upper plate had smaller diameter holes and the lower plate had large ones, as shown in Figure 13 a [ 58 ]. The Q of the device was 3400 in a getter-less vacuum ceramic package with a pressure of about 6–10 Pa.…”

Section: Mems Accelerometers With a Low Noise Interface Circuitmentioning

confidence: 99%

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Wang

Chen

Wang

et al. 2020

Sensors

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This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/√Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.

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Section: Mems Accelerometers With a Low Noise Interface Circuitmentioning

confidence: 99%

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Wang

Chen

Wang

et al. 2020

Sensors

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“…Micro vibration measurement is required in various fields, such as infrastructure health monitoring [1] or satellite performance analysis [2]. Many types of sensors have been developed and used, such as high-sensitivity accelerometers, broadband seismometers, or low-noise microelectromechanical system (MEMS) accelerometers (e.g., [3,4,5]). The calibration of the sensor frequency response is essential for the reliability of micro vibration measurements.…”

Section: Introductionmentioning

confidence: 99%

Precise sinusoidal signal extraction from noisy waveform in vibration calibration

Shimoda,

Kokuyama,

Nozato

2022

Preprint

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Precise extraction of sinusoidal vibration parameters is essential for the dynamic calibration of vibration sensors, such as accelerometers. However, several standard methods have not yet been optimized for large background noise. In this work, signal processing methods to extract small vibration signals from noisy data in the case of accelerometer calibration is discussed. The results show that spectral leakage degrades calibration accuracy. Three methods based on the use of a filter, window function, and numerical differentiation are investigated with theoretical calculations, simulations, and experiments. These methods can effectively reduce the contribution of the calibration system noise. The uncertainty of micro vibration calibration in the National Metrology Institute of Japan is reduced by two orders of magnitudes using the proposed methods. The theoretical analyses in this work can lay the foundation for the optimization of signal processing in vibration calibration, and can be applied to other dynamic calibration fields.

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