Design of Radio Frequency (RF) MEMS Switches: Modeling

Zhu, Yong; Espinosa, Horacio D.

doi:10.1115/imece2003-41945

Cited by 7 publications

(6 citation statements)

References 12 publications

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“…The Newton-Raphson scheme is also utilized to solve effectively the system of nonlinear equations resulting from the electric force. In addition, the MEMS switch for these coupled-field problems was simulated using ANSYS (Zhu and Espinosa 2003), but the precision of this method depends on computational grids or meshes. Moreover, the meshing can occupy 60-70% of the time in analyzing process, this hinders their application to high dimensional or geometrically complex problems.…”

Section: Introductionmentioning

confidence: 99%

Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

Wang

et al. 2008

Microsyst Technol

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The MEMS capacitive switch based on fixedfixed microbeam has garnered significant attention due to their geometric simplicity and broad applicability. The accurate model which describes the multiphysical coupledfield of MEMS capacitive switch should be developed to predict their electromechanical behaviors. The improved macromodel of the fixed-fixed microbeam-based MEMS capacitive switch is presented to investigate the behavior of electrically actuated MEMS capacitive switch in this paper, the macromodel provides an effective and accurate design tool for this class of MEMS devices because of taking account into some effects simultaneously including fringing field effect, midplane stretching effect, residual stress and multiphysical coupled-field effect. The numerical analysis of mechanical characterizations of electrically actuated microbeam-based MEMS capacitive switch are performed by the finite element Newmark method, and the performances of static and dynamic of MEMS capacitive switch are obtained. The numerical results show that, with only a few nodes used in the computation, the FEMNewmark gives the identical results to other numerical methods, such as the shooting method and experiments. Moreover, the proposed model can offer proper and convenient approach for numerical calculations, and promote design of MEMS devices.

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Section: Introductionmentioning

confidence: 99%

Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

Wang

et al. 2008

Microsyst Technol

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“…For a rectangular switch membrane, Eq. (5) can be easily integrated numerically and provides precise answers when compared to a 3D full simulation [11][12].…”

Section: D Distributed Modelmentioning

confidence: 99%

“…Corning Intellisense, Coventor, and MEMSCAP have developed integrated electromechanical software packages for these coupled-field problems [1]. Recently, the authors have implemented a 3D FEA model and simulated MEMS switches at various operational temperatures using ANSYS [11,12]. The simulation consisted of two steps in sequence: a thermo-structural analysis followed by an electrostatic-structural analysis.…”

Section: D Fea Modelmentioning

confidence: 99%

“…In order to accurately describe the switch deformation and predict the pull-in voltage, an effort to realize modeling has to be made. In the following section, we will discuss a simple 1D parallel-plate actuator model [7,8], a 2D distributed model [9,10], and a 3D fully coupled model [11,12]. The analyses and simulations are dedicated to capacitive MEMS switches, although they are also applicable to other types of electrostatic devices.…”

Section: Electromechanical Modeling Of Rf Mems Switchesmentioning

confidence: 99%

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Reliability of capacitive RF MEMS switches at high and low temperatures

Zhu

Espinosa

2004

Int J RF and Microwave Comp Aid Eng

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Some applications of RF MEMS switches, such as aircraft condition monitoring and distributed satellite communication, present a unique challenge for device design and reliability. This article examines these switches when operational temperatures in the range ؊60°C to 100°C are envisioned. The basic operation of a capacitive MEMS switch is described and two tools for examining device reliability, modeling, and on-chip experimentation, are discussed in the case of capacitive MEMS switches. 1D, 2D, and 3D models are presented with emphasis on 3D coupled-field finite-element analysis, including temperature effects. Results and findings from the 3D simulations are reported. In particular, the advantages of employing corrugated membranes in the design of RF MEMS switches are assessed. Their performance in terms of reliability as a function of temperature is quantified. The effects of corrugation on the geometric parameters are discussed in the context of device-design optimization. In order to assess reliability experimentally, the M-test and the membrane deflection experiment (MDE) are reviewed due to their on-chip characteristic and simplicity. Ways in which these experimental/computational methodologies can be combined for identifying material properties and device performance is also highlighted.

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“…Despite such applications, there are a few literatures concerning efficient models and design tools to simulate the static and dynamic behavior of this beamlike structure. Zhu and Espinosa made a thorough study for the effect of the temperature and residual stress on the pull-in voltage of the structure [5,6]. They utilized a finite element model (FEM) to estimate the pull-in parameters.…”

Section: Introductionmentioning

confidence: 99%

Behavior simulation for electrically actuated bow-tie shaped fixed-fixed beams based on nodal analysis method

Huang

2009

SPIE Proceedings

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This paper reports a nodal model for the trapeziform beam element with gradual change cross-sections. Using this model, electromechanical behavior of the electrically actuated bow-tie shaped fixed-fixed beams can be simulated in a system level. The model is developed by treating the governing equations of the trapeziform beam based on the Galerkin residual method and decomposing the 4 th -order partial differential equation into discrete modal ordinary differential equations. After that, the equivalent circuits and corresponding nodal model are established. In the model, the nonlinearities including mid-plane stretching and electrostatic forcing are considered. The accuracy of the developed model is verified by extensively comparing the static and dynamic analysis results with those obtained from FEA and available experiment data. The developed model is also applicable to beam-like structures with uniform cross-sections.

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Design of Radio Frequency (RF) MEMS Switches: Modeling

Cited by 7 publications

References 12 publications

Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

Reliability of capacitive RF MEMS switches at high and low temperatures

Behavior simulation for electrically actuated bow-tie shaped fixed-fixed beams based on nodal analysis method

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