Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

He, Xiaodong; Wu, Qun; Wang, Yue; Song, Mingxin; Yin, Jinghua

doi:10.1007/s00542-008-0702-4

Cited by 21 publications

(9 citation statements)

References 10 publications

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“…On the other hand, the tensile axial force has the effect to stretch the beam, which hinders the pull-in, so more voltage (larger electrostatic force) is required. Similar conclusions have also been found by the theoretical and experimental studies in the literature (AbdelRahman et al, 2002;Ballestra et al, 2010;He et al, 2009;Huang et al, 2001;Jia et al, 2011).…”

Section: Snap-through Behaviorsupporting

confidence: 86%

On the parameters which govern the symmetric snap-through buckling behavior of an initially curved microbeam

Chen

Meguid

2015

International Journal of Solids and Structures

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a b s t r a c tIn this paper, we extend the earlier studies to investigate the effects of various parameters which govern the symmetric snap-through buckling of an initially curved microbeam subject to an electrostatic force. The governing formulations are developed using Euler-Bernoulli beam theory. The mid-plane stretching experienced during the snap-through buckling is considered using von Karman nonlinear strain, and the nonzero strain component is determined and solved using Galerkin decomposition approach. The studied parameters include: beam fixation type (double-clamped and simply-supported), arch shape, residual axial force, and uniform temperature variation. The results of our work reveal the significant effects of the type of the beam fixation, the residual force, and the temperature variation on the criterion for the symmetric snap-through buckling of microbeams, while the effect of the arch shape is somewhat insignificant.

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Section: Snap-through Behaviorsupporting

confidence: 86%

On the parameters which govern the symmetric snap-through buckling behavior of an initially curved microbeam

Chen

Meguid

2015

International Journal of Solids and Structures

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“…Actually, a fringing eld always exists, and a more realistic situation, including the \fringing-eld", should be taken into consideration. The electrostatic force per unit length can be written as follows [1,33]:…”

Section: Modeling and Formulationmentioning

confidence: 99%

Pull-in criteria of a nonclassical microbeam under electric field using homotopy method

2017

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Abstract. In this study, a homotopy analysis method was used to obtain analytic solutions to predict dynamic pull-in instability of an electrostatically-actuated microbeam. The nonlinear describing equation of a microbeam a ected by an electric eld, including the fringing eld e ect, was obtained based on strain gradient elasticity, couple stress, and classical theory. In uences of di erent parameters on dynamic pull-in instability were investigated. The equation of motion of a double-clamped microbeam was discretized and solved by using Galerkin's method via mode summation. The resulting non-linear di erential equation was also solved by using the Homotopy Analysis Method (HAM). The in uence of HAM parameters on accuracy was studied speci cally in the vicinity of the pull-in voltage. Comparison of the results of pull-in voltage indicated that low-voltage good agreement exists between numerical and semi-analytical methods, while HAM results deviated from those of numerical methods at high voltages. Findings indicate that strain gradient and couple stress e ects result in a sti er microbeam than with classical theory. E ects of an auxiliary parameter on convergence were also studied. Convergence domains were determined at di erent voltages and orders of HAM approximation.

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“…Dynamic analysis on cantilever based sensors is also performed in [5,6], and they observed the behavior by changing the deposited mass on tip of cantilever, which showed that the shift in resonance frequency is directly related to the added mass. In [7], an improved model of micro bridge based MEMS switch was developed to account for large deflections and dynamic loads. They used this model to predict the behavioral dynamics of the switch under capacitive actuation.…”

Section: Introductionmentioning

confidence: 99%

Frequency analysis of electrostatic cantilever-based MEMS sensor

Shoaib

Hisham

Basheer

et al. 2015

2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

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This paper presents an analytical approach to model the dynamic behavior and predict the frequency of electrostatic cantilever based MEMS (Microelectromechanical system) sensor for mass detection. The concept of dynamic mass is used to formulate the resonance frequency in damped and undamped medium. In the modeling, electrostatic force is coupled with the bending moment of cantilever to produce actuation at a resonance frequency. Mass of blood cells is used as an external load on the cantilever which results in shift in resonance frequency. This shift due to additional mass is sensed by the piezoresistive mechanism. The device analytical model is integrated using Simulink tool to study the dynamic behavior. The same device is then designed using COMSOL tool and FEM analysis is performed. The analytical results are compared with the simulated results.

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Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

Cited by 21 publications

References 10 publications

On the parameters which govern the symmetric snap-through buckling behavior of an initially curved microbeam

On the parameters which govern the symmetric snap-through buckling behavior of an initially curved microbeam

Pull-in criteria of a nonclassical microbeam under electric field using homotopy method

Frequency analysis of electrostatic cantilever-based MEMS sensor

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