Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology

Giacomozzi, F.; Proietti, Emanuela; Capoccia, Giovanni; Sardi, Giovanni Maria; Bartolucci, G.; Iannacci, Jacopo; Tagliapietra, Girolamo; Margesin, B.; Marcelli, R.

doi:10.3390/s23010466

Cited by 10 publications

(6 citation statements)

References 19 publications

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“…In MEMS switches, the most utilized actuation methods are electrostatic, electrothermal, electromagnetic, piezoelectric, and SMA [97,[115][116][117][118][119]. These switches are used in series, shunt, or mixed configurations with transmission lines of test systems as well as communication systems.…”

Section: Types Of Mems Switchesmentioning

confidence: 99%

“…The meanders of different shapes and holes with different shapes have been introduced to further improve performance of the designed switches [111][112][113][114]. In MEMS switches, the most utilized actuation methods are electrostatic, electrothermal, electromagnetic, piezoelectric, and SMA [97,[115][116][117][118][119]. These switches are used in series, shunt, or mixed configurations with transmission lines of test systems as well as communication systems.…”

Section: Geometric Constraintsmentioning

confidence: 99%

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MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

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Section: Types Of Mems Switchesmentioning

confidence: 99%

Section: Geometric Constraintsmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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“…The complete structure of the coupled resonators looks like a hexagon because of the mirrored arrangement. It might be stressed that a symmetric configuration was always the best solution for all the studied resonators from the electrical performance point of view, mainly because a CPW favors a symmetric coupling considering the specific geometry of the feeding line [31][32][33].…”

Section: Experimental Determination Of the Metamaterials Nature Of A ...mentioning

confidence: 99%

Equivalent Circuits for Microwave Metamaterial Planar Components

Marcelli

2024

Sensors

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Metamaterial components and antennas are based on the general understanding that an artificial structure composed of adequately designed and manufactured elementary cells or arrays has unusual resonance and propagation properties. Metamaterials exhibit equivalent values of the dielectric constant and magnetic permeability that are both negative simultaneously, in contrast with ordinary materials. Single elements, periodic, or quasi-periodic configurations can be suitable for a metamaterial response. In this paper, equivalent circuits for microwave propagation and resonance are compared, deriving a lumped element modeling complementary to those already available in the literature, with a particular focus on planar resonating devices and calculating the effective value for the dielectric constant and the magnetic permeability directly from experimental findings using the impedance (Z-parameters) notation.

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“…Due to the high-speed development of related industries within the metaverse that put forward higher performance requirements for RF MEMS devices, RF switches, as the most basic and critical components, not only have the advantages of low insertion loss, high isolation, high linearity, and high reliability, but RF MEMS switches also mechanical motion to control the on and off of RF signal transmission and can be used in switching networks [40], phase shifters [41], reconfigurable and microstrip antennas [42,43], varactor tubes [44], tunable filters [45], attenuators [46], and combination shutters for defense systems and wireless communication systems. Aluminum Nitride in MEMS Reprinted with permission from [30].…”

Section: Rf Me Ms Device Classification and Structurementioning

confidence: 99%

A review of research on RF MEMS for metaverse interactions

Nan,

Jia,

et al. 2024

J. Micromech. Microeng.

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Metaverse as a comprehensive integration of multiple digital technologies of the new generation, enables human beings to bring unprecedented immersive experiences with the support of virtual reality, augmented reality, blockchain, digital twin, Artificial Intelligence, haptic IoT, and human-computer interaction. In view of the urgent need for high-speed and high-capacity data transmission as well as high integration, RF MEMS devices have become the core components for metaverse system building due to their advantages of miniaturization, high integration, and low power consumption. Playing a pivotal role in real-time high-capacity data transmission and signal processing in metaverse interactive systems, the low cost and high performance of RF MEMS devices have once again become the focus of attention for people from all walks of life. Therefore, this paper focuses on the working principles and performance optimization of RF MEMS devices. Firstly, the classification and basic principles of RF MEMS devices are introduced, followed by the advanced fabrication technology and optimization scheme of MEMS devices, and then the advanced applications of RF MEMS devices in the field of metaverse are discussed in focus, including IoT mobile communication, Artificial Intelligence, and flexible wearables. Finally, the prospects and potential challenges for the development of RF MEMS devices interacting with the metaverse are summarized and discussed.

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Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology

Cited by 10 publications

References 19 publications

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Equivalent Circuits for Microwave Metamaterial Planar Components

A review of research on RF MEMS for metaverse interactions

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