Design, operation, and motion characteristics of a precise piezoelectric linear motor

Hii, King-Fu; Vallance, R. Ryan; Mengüç, M. Pınar

doi:10.1016/j.precisioneng.2009.06.005

Cited by 28 publications

(15 citation statements)

References 27 publications

(47 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This disturbance motion grows with the environmental spring force until it equals the step displacement at which time an equilibrium of the two displacements is reached. Similar observations were made by [6,10].…”

Section: Test Data and Control Performancesupporting

confidence: 88%

“…One of the longstanding issues with inchworm technology is that actuation of the brakes causes unintended motion of the moved element. This phenomenon has been reported and characterized by other researchers such as [6,[8][9][10]. The JPL FIA mechanism is no exception.…”

Section: Introductionsupporting

confidence: 74%

“…None of these actuators, however, have been flight-qualified for space applications. The inchworm actuator described in [6] was designed to be vacuum compatible for use in a scanning electron microscope (SEM) and was designed for long-term thermal stability, but was not required to survive launch loads as the FIA was. Moreover, this inchworm made use of shear mode PZTs which are known to suffer from severe hysteresis [7] and have limited stroke.…”

Section: Introductionmentioning

confidence: 99%

“…These PZTs are used to grasp and move a runner attached to the optic to be moved. By adjusting preload rods, each brake can be configured for either a power-off or power-on parked state, which is a feature that has not been seen in previous brake designs, such as those mentioned in [6,[8][9][10] which are all power-off brakes. The advantage of power-on brakes is that the holding force is generally greater than relying on the compliance of the mechanism to hold the actuator in place.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Shields

2019

Actuators

View full text Add to dashboard Cite

Inchworm actuators are innovative mechanisms that offer nanometer-level positioning coupled with extreme dynamic range. Because of this, they have found applications in optical instruments of various types including interferometers, segmented reflectors, and coronagraphs. In this paper, we present two prototypes of flight-qualifiable inchworm actuators developed at the Jet Propulsion Laboratory. These actuators have two sets of brake piezoceramic (PZT) stacks and an extension PZT stack used for mobility. By proper phasing of the signals to these PZTs, a walking gait can be achieved that moves a runner attached via a flexure to the optic to be moved. A model of these devices, based on first principles, is developed as well as an estimation and control scheme for precise positioning. The estimator estimates physical parameters of the device as well as a self-induced motion disturbance caused by the brakes. Simulations and test data are presented that demonstrate nanometer-level positioning precision as well as the cause of variations in the brake-induced disturbance.

show abstract

Section: Test Data and Control Performancesupporting

confidence: 88%

Section: Introductionsupporting

confidence: 74%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Shields

2019

Actuators

View full text Add to dashboard Cite

show abstract

“…Piezoelectric actuators enable simple and high-power operation, because they do not require complicated coil structures like magnetic motors [1][2][3][4][5][6]. In particular, in small size, these properties become important.…”

Section: Introductionmentioning

confidence: 99%

Resonant-Type Smooth Impact Drive Mechanism Actuator with Two Langevin Transducers

2012

View full text Add to dashboard Cite

A smooth impact drive mechanism (SIDM) is a unique piezoelectric actuator that is widely used as a camera focusing mechanism, cell phone lens movement mechanism, etc. This principle enables a compact driving mechanism; however, it cannot generate high-speed movement because a soft-type multilayered piezoelectric transducer (PZT) is utilized at off-resonant movement. This paper proposes a resonant-type SIDM actuator driven with hard-type PZTs to realize high-speed and powerful operation. The fundamental principle is also based on the conventional SIDM; therefore, a saw-shaped movement is required. To generate a high-power ultrasonic output, two Langevin transducers are adopted instead of a soft-type multilayered PZT. One Langevin transducer was a stator and the other was slider whose tip was adhered to a carbon fiber reinforced plastic (CFRP) rod. The CFRP rod was connected to the stator transducer with the frictional force. To obtain quasi-saw-shaped vibration, the longitudinal vibration for each Langevin transducer was excited and these movements were added at the connection point at the CFRP rod. In order to combine these vibration modes, the lengths of the stator and slider Langevin transducers were designed to make the resonant frequencies ratio to be 1:2. By using the proposed principle, the slider Langevin transducer was successfully driven with the speed of 0.11 m/s and the output force was 1.8 N with no load.

show abstract

A New Linear Motor with Two Piezoelectric Stacks Based on Differential Friction Effects

Huang

Chen

Zhang

2014

Mechanisms and Machine Science

View full text Add to dashboard Cite

Design, operation, and motion characteristics of a precise piezoelectric linear motor

Cited by 28 publications

References 27 publications

Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Asynchronous Control of a Prototype Inchworm Actuator: Control Design and Test Results

Resonant-Type Smooth Impact Drive Mechanism Actuator with Two Langevin Transducers

A New Linear Motor with Two Piezoelectric Stacks Based on Differential Friction Effects

Contact Info

Product

Resources

About