Design optimization of a limited angle voice coil actuator for use in a wire bonding application

Widdowson, G.P.; Kuah, T.H.; Vath, Charles J.

doi:10.1109/peds.1997.618740

Cited by 4 publications

(3 citation statements)

References 1 publication

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“…Notation c a constant parameter c x X -axis equivalent damping coefficient (Ns/m) E 1 the Young modulus of the bearing (GPa) E 2 the Young modulus of the lapping plate (GPa) F x the output force of the X -axis VCM (N) I x the current of the X -axis VCM (A) k b the stiffness of the pushing plate (N/mm) k g the electromagnetic stiffness of the X -axis VCM (N/mm) k x X -axis equivalent stiffness (N/mm) K contact stiffness (N/mm) K D differential gain K F the force constant of the X -axis VCM (N/A) K I integral gain K P proportional gain m x the equivalent mass of the X -axis motion system (kg) q a constant parameter r reference input (mm) R relative radius (mm) R 1 the effective radius of the bearing (mm) …”

Section: Appendixmentioning

confidence: 99%

“…Thermosonic wire bonding is one of the key electrical interconnection technologies in microelectronic manufacturing, and it constructs electrical interconnections using fine gold wire or other kinds of metal with diameter ranging from 25 to 65 μm [1,2]. Smaller pad size and finer pitch require more accurate tracking at a higher speed of the positioning mechanism [3,4].…”

Section: Introductionmentioning

confidence: 99%

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Robust and precision control for a directly-driven XY table

Wang

Xing

Zhang

et al. 2011

Proceedings of the Institution of Mechanical Engineers, Part C:

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To provide faster, more repeatable, and stronger microelectronics bonding technology, this article presents the design and implementation of a robust and precision controller for a highspeed linear voice-coil motor, direct-drive, XY positioning table. Moreover, the dynamic design methodology of the control system for the positioning table is proposed based on electromechanical co-simulation. Using the finite-element method and dynamic analysis, the rigid-flexible coupled mechanical model of the XY table is established. With the aid of the system identification approach, the open-loop model of the control system for the X -axis table is obtained. On this basis, the proportion integration differentiation controller with incomplete derivation and the sliding mode controller (SMC) with the exponential reaching law are designed to control the X -axis table. The performances of the controllers are investigated using electromechanical cosimulations and experimental tests, and the results show that the motion overshoot and settling time are reduced using the SMC with an exponential reaching law. The SMC with the exponential reaching law also shows strong robustness against external disturbances. The experiment and co-simulation results are in good agreement, which confirms the validity and feasibility of the dynamic design methodology for a high-speed and high-accuracy positioning table based on electromechanical co-simulation.

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Section: Appendixmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Robust and precision control for a directly-driven XY table

Wang

Xing

Zhang

et al. 2011

Proceedings of the Institution of Mechanical Engineers, Part C:

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show abstract

“…The self inductance of the voice coil winding was calculated using a two step process [3] that Itas proven accurate for single phase windings Once the inductance and resistance were determined, the current response was eslitnaled from.…”

Section: B Eiectricd Designmentioning

confidence: 99%

Design, analysis and testing of a linear/theta motor for semiconductor applications

Widdowson¹,

Kuah

Liao³

et al.

Proceedings of Second International Conference on Power Electronics and Drive Systems

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LINEAR 1 ROTARY ASM TECHNOLOGY SINGAPORE 2 YISHUN AVENLE 7 SJNGAPORE 768924 Load Abstract sou g 0.00015 FIn this paper, the &sign opdm'zation of an irntegral linear and rotary motor, used in the application of aluminium wedge wire bonds onto integrated circuits, will be described The use of a threepkase rotary motor combined with a linear voice coil motor, as well as the benn'ng technologies that Make such a &sign. possible, will be explored The lumped patameter magrteaic circuit modeling, constrained optimizlttim ~n d magnetostatic .finite element analysis (FEA) pdormed to prodwe the optit" design will be discussed Detailed experimratal verification wiU dso be presented to validate the theareticnl predictions DUh Cvclc Section I1 will illustrate the specificatiofi for the motor in the wedge bonder application Section III will describe in detail how the choice of motor topologies was determined and how alternative types of bearing technology can affect the motor design. It will also examine the encoders and drivers that were chosen €or each axis In section IV, the details of the lumped parameter magnetic circuit design, electrical design and optimization will be presented Section V will concentrate on the magnetostatic FEA that was performed to veri6 the analy.tical techniques Section VT will describe the experimental results used to prove the validity of the theoretical predictions and to gain insight into the coupling effects between the two axes 44 Yo

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Sensors and actuators: finite element and boundary element analyses and simulations. A bibliography (1997–1998)

Mackerle¹

1999

Finite Elements in Analysis and Design

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Design optimization of a limited angle voice coil actuator for use in a wire bonding application

Cited by 4 publications

References 1 publication

Robust and precision control for a directly-driven XY table

Robust and precision control for a directly-driven XY table

Design, analysis and testing of a linear/theta motor for semiconductor applications

Sensors and actuators: finite element and boundary element analyses and simulations. A bibliography (1997–1998)

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