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LINEAR 1 ROTARY ASM TECHNOLOGY SINGAPORE 2 YISHUN AVENLE 7 SJNGAPORE 768924 Load Abstract sou g 0.00015 FIn this paper, the &sign opdm'zation of an irntegral linear and rotary motor, used in the application of aluminium wedge wire bonds onto integrated circuits, will be described The use of a threepkase rotary motor combined with a linear voice coil motor, as well as the benn'ng technologies that Make such a &sign. possible, will be explored The lumped patameter magrteaic circuit modeling, constrained optimizlttim ~n d magnetostatic .finite element analysis (FEA) pdormed to prodwe the optit" design will be discussed Detailed experimratal verification wiU dso be presented to validate the theareticnl predictions DUh Cvclc Section I1 will illustrate the specificatiofi for the motor in the wedge bonder application Section III will describe in detail how the choice of motor topologies was determined and how alternative types of bearing technology can affect the motor design. It will also examine the encoders and drivers that were chosen €or each axis In section IV, the details of the lumped parameter magnetic circuit design, electrical design and optimization will be presented Section V will concentrate on the magnetostatic FEA that was performed to veri6 the analy.tical techniques Section VT will describe the experimental results used to prove the validity of the theoretical predictions and to gain insight into the coupling effects between the two axes 44 Yo

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