Desorption Processes Induced By Laser Radiation In The "Semiconductor-Water" System

Beklemyshev, V. I.; Makhonin, I. I.; Petrov, Yu. N.; Prokhorov, A. M.; Pustovoĭ, V. I.

doi:10.1117/12.950620

Cited by 2 publications

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“…Among other important applications, we should also mention surface laser cleaning [42]. This phenomenon was discovered independently by several research teams: the group with participation of the Nobel Prize winner A.M. Prokhorov [43] and the IBM European laboratory (priority of patent [44] on 1987). It was shown in the aforementioned studies that, using pulsed laser irradiation, one can remove metal and dielectric microparticles of submicron sizes from the surfaces of semiconductor devices.…”

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confidence: 99%

Optical Phenomena in Dielectric Spheres Several Light Wavelengths in Size: A Review

et al. 2022

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confidence: 99%

Optical Phenomena in Dielectric Spheres Several Light Wavelengths in Size: A Review

et al. 2022

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“…The first one is called Dry Laser Cleaning (DLC), where the surface to be cleaned is simply irradiated by a short laser pulse [1,2,3]. In Steam Laser Cleaning (SLC) a thin layer of a liquid energy transfer medium is deposited on the surface prior to the laser pulse [1,2,4,5]. In this paper we will present a short overview of these techniques followed by some of our recent results.…”

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confidence: 99%