Detection Limit of Photoluminescence Method for Determination of Carbon Impurity Concentration in Silicon

Satake, Yuta; Tajima, Michio; Asahara, Shota; Ogura, Atsushi

doi:10.1109/edtm53872.2022.9798311

2022 6th IEEE Electron Devices Technology &Amp; Manufacturing Conference (EDTM) 2022

DOI: 10.1109/edtm53872.2022.9798311

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Detection Limit of Photoluminescence Method for Determination of Carbon Impurity Concentration in Silicon

Yuta Satake

Michio Tajima

Shota Asahara

et al.

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Detection Limit of Photoluminescence Method for Determination of Carbon Impurity Concentration in Silicon

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References 5 publications

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