“…In recent years, microfluidic chips have aroused increasing interest for various application because of their desirable features, such as the smaller sample amount needed and lowered reagent consumption. The substrate materials of microfluidic chips such as polymers (e.g., PDMS, PMMA, PS) [ 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 ], ceramics (e.g., glass) [ 6 , 13 , 14 , 16 , 17 , 18 , 19 , 21 , 25 , 35 , 36 , 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 , 57 , 58 , 59 , 60 , 61 , 62 , 63 ], and semiconduct...…”