1986
DOI: 10.1021/ac00295a034
|View full text |Cite
|
Sign up to set email alerts
|

Determination of carbon in trichlorosilane by metastable transfer emission spectrometry

Abstract: The detection limit for carbon Impurities In liquid trichlorosilane has been lowered to 3 ppb, an order of magnitude Improvement over previous techniques, by use of metastable transfer emission spectrometry (MTES). The technique described

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

1989
1989
2012
2012

Publication Types

Select...
4

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
references
References 15 publications
0
0
0
Order By: Relevance