Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear Resonances

Chen, Hailong; Jia, Hao; Zorman, Christian A.; Feng, Philip X.‐L.

doi:10.1109/jmems.2020.3020568

Cited by 5 publications

(5 citation statements)

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“…The enhancement in Q factor and mass sensing performance when using high-order flexural modes has been demonstrated in many cases [9,27,[31][32][33][34][35]. Taking cantilever resonators in air as an example, a ~5-fold increase in Q factors, ~6-fold increase in mass sensitivity, and >8-folder improvement in mass resolution have been demonstrated using the 2nd-order bending mode than using fundamental mode (as shown in Table 1).…”

Section: Integrated Resonant Gravimetric Sensors Using Higher-order B...mentioning

confidence: 95%

Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

Jia

2021

Micromachines

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Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality (Q) factors and mass sensing performance in viscous media. Such resonant mass sensors have shown great potential in detecting many kinds of trace analytes in gas and liquid phases, such as chemical vapors, volatile organic compounds, pollutant gases, bacteria, biomarkers, and DNA. The integrated MEMS/NEMS mass sensors will continuously push the detection limit of trace bio/chemical molecules and bring a better understanding of gas/nanomaterial interaction and molecular binding mechanisms.

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Section: Integrated Resonant Gravimetric Sensors Using Higher-order B...mentioning

confidence: 95%

Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

Jia

2021

Micromachines

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“…In this approach, [243][244][245][246][247] different techniques have been suggested to attain the high signal-to-noise ratio (SNR) in the higher-order modes and minimize actuation force such as exerting the electromagnetic force at the maximum deflection points, [248] partial electrode configurations in which the lower electrode is designed to match the stimulated mode shape, [249][250][251] and decreasing the resonator width. [252]…”

Section: Exciting the Higher-order Vibration Modesmentioning

confidence: 99%

“…Some researchers [145,246,449,450] highlighted the benefits of evaluating the nonlinear resonant frequency of a micro/nanostructure. For instance, the extraction of the physical quantities such as Young's modulus E Y of a square silicon carbide (SiC) thin diaphragm in the membrane regime was demonstrated by measuring the Duffing response of a higher-order mode.…”

Section: Nonlinear Single Micro/nanoresonators With 1dofmentioning

confidence: 99%

“…For instance, the extraction of the physical quantities such as Young's modulus E Y of a square silicon carbide (SiC) thin diaphragm in the membrane regime was demonstrated by measuring the Duffing response of a higher‐order mode. [ 246 ] Further, [ 451 ] reported an enhancement of a weak signal by using vibrational resonance in a forced nanoelectromechanical nonlinear resonator. Compared to the linear nanoresonators, the nanomechanical mass detection using nonlinear resonators demonstrates quite unique features such as the resonant frequency increase induced by the mass adsorption.…”

Section: Fundamental Concepts Of Nano/micromechanical Resonatorsmentioning

confidence: 99%

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A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Ghaemi

Nikoobin

Ashory

2022

Adv Elect Materials

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Micro/nanoelectromechanical systems (M/NEMS), especially micro/nanomechanical resonators, provide an unprecedented platform for investigating a wide range of applications in both fundamental physical phenomena (such as quantum‐level problems) and engineering and applied sciences (like sensing physical quantities and signal processing). In sensing context, these tiny resonators are invaluable tools for detecting weak forces and single molecules. Measuring such small variations in sub‐nanometer amplitudes at high frequencies has created many practical challenges. Therefore, maximizing the responsivity to a specified input parameter and minimizing the responsivity to other inputs such as noise are considered as the optimal design for the excellent performance in nanoresonators. The present review aims to summarize some of the recent progress in this rapidly advancing field. Specifically, more attention is paid to the topics related to the dynamical behaviors of micro/nanoresonator and their practical applications. First, the theory behind micro/nanoresonators is described. Then a summary is presented of the basic concepts in resonant devices. In addition, several commonly dynamical techniques to enhance sensitivity are introduced. Finally, the devices are classified based on linear and nonlinear, single and array, symmetric and asymmetric, and frequency shift‐based and amplitude shift‐based resonators, along with the relative advantages and disadvantages of each one in engineering applications.

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“…3,4,5 The bandgap at Eg = 4.8 eV also introduces a photon absorption edge at the cut-off wavelength of solar-blind ultraviolet (SBUV) light, making β-Ga2O3 attractive for light detection in SBUV regime. 6,7 Further, β-Ga2O3 has excellent Young's modulus (EY = 230-280 GPa according to initial studies), 8,9,10,11,12 which is better than or comparable to those of the conventional materials for micro/nanoelectromechanical systems (M/NEMS), such as silicon (EY,Si = 130-190 GPa), 13 silicon carbide (EY,SiC = 390-480 GPa), 14 and gallium nitride (EY,GaN = 210-405 GPa). 15 Thus β-Ga2O3 is also attractive for M/NEMS applications.…”

mentioning

confidence: 99%

Young's modulus and corresponding orientation in β-Ga2O3 thin films resolved by nanomechanical resonators

Zheng

Zhao

Jia

et al. 2021

Applied Physics Letters

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We report on the non-destructive measurement of Young's modulus of thin-film single crystal beta gallium oxide (β-Ga2O3) out of its nanoscale mechanical structures by measuring their fundamental mode resonance frequencies. From the measurements, we extract Young's modulus in (100) plane, EY,( 100) = 261.4±20.6 GPa, for β-Ga2O3 nanoflakes synthesized by low-pressure chemical vapor deposition (LPCVD), and Young's modulus in [010] direction, EY,[010] = 245.8±9.2 GPa, for β-Ga2O3 nanobelts mechanically cleaved from bulk β-Ga2O3 crystal grown by edgedefined film-fed growth (EFG) method. The Young's moduli extracted directly on nanomechanical resonant device platforms are comparable to theoretical values from firstprinciple calculations and experimentally extracted values from bulk crystal. This study yields important quantitative nanomechanical properties of β-Ga2O3 crystals, and helps pave the way for further engineering of β-Ga2O3 micro/nanoelectromechanical systems (M/NEMS) and transducers.

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Determination of Elastic Modulus of Silicon Carbide (SiC) Thin Diaphragms via Mode-Dependent Duffing Nonlinear Resonances

Cited by 5 publications

References 36 publications

Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

Young's modulus and corresponding orientation in β-Ga2O3 thin films resolved by nanomechanical resonators

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