2021
DOI: 10.3390/mi12060645
|View full text |Cite
|
Sign up to set email alerts
|

Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid

Abstract: Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality (Q) fa… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
9
0

Year Published

2021
2021
2024
2024

Publication Types

Select...
8
1

Relationship

0
9

Authors

Journals

citations
Cited by 25 publications
(9 citation statements)
references
References 73 publications
0
9
0
Order By: Relevance
“…Suspended graphene was integrated in spring-mass and piezoresistive sensors for accelerometers . NEMS processed cantilevers show trace gas sensing with resolution to single atom by the chemisorption induced resonance-frequency deviation. Graphene vibrometer can measure vibration of buildings for Internet of Things applications .…”
Section: Electronic Nose For Smellmentioning
confidence: 99%
“…Suspended graphene was integrated in spring-mass and piezoresistive sensors for accelerometers . NEMS processed cantilevers show trace gas sensing with resolution to single atom by the chemisorption induced resonance-frequency deviation. Graphene vibrometer can measure vibration of buildings for Internet of Things applications .…”
Section: Electronic Nose For Smellmentioning
confidence: 99%
“…Recently, a detailed review on the resonant micro/nano gravimetric sensors for bio/chemical sensing applications in air and liquid was published. [ 228 ]…”
Section: Fundamental Concepts Of Nano/micromechanical Resonatorsmentioning
confidence: 99%
“…Thus, Jia et al ( 2021) integrated the reverberating nano or micro sensors (gravimetric) towards the biochemical recognition of biomolecules in liquid and air. The gravimetric sensor with immobilized enzymes was proposed to be beneficial towards the detection of trace analytes in bacteria, biomarkers, DNA, volatile organic compounds, chemical vapors, and pollutant gases, via distinct in-plane, torsional, extensional, and flexural modes [59].…”
Section: Piezoelectric and Gravimetric Biosensormentioning
confidence: 99%