The structural homogeneity and degree of perfection inherent to mosaic Ge:Sb samples were investigated. The modified methods for analyzing diffraction images of backscattered electrons (Kikuchi patterns) were used to reduce the influence of instrumental factors. The root-mean-square deformations in the local regions of separate grains and at the boundaries between them were determined using the value of the spatial frequency of the energy spectrum of two-dimensional Fourier transform of Kikuchi patterns. It is shown that the maximum values of deformations (∼3.5⋅10-3) are typical for local regions, which are usually located at the boundaries between subgrains. X-ray studies confirm obtained values of root-mean-square deformations.