1985
DOI: 10.1063/1.95939
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Determination of minority-carrier generation lifetime in beam-recrystallized silicon-on-insulator structure by using a depletion-mode transistor

Abstract: We describe a technique for measuring minority-carrier lifetime on a very small area of material and apply this technique to recrystallized silicon layers on an insulating substrate where the localization of the crystalline defects gives rise to small defect-free regions actually used for devices. The method uses a depletion-mode transistor in which drain-source conductance yields a signal equivalent to capacitance signal, thus allowing measurements equivalent to conventional Zerbst transient capacitance to be… Show more

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Cited by 39 publications
(7 citation statements)
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“…This information would not otherwise be accessible solely from the mathematical fit used in our previous paper [ 3 ]. Moreover, this time constant value strongly agrees with previous reports of the time scale of photo-generation and electron–hole pair separation in other silicon samples [ 9 , 15 16 ].…”
Section: Resultssupporting
confidence: 92%
“…This information would not otherwise be accessible solely from the mathematical fit used in our previous paper [ 3 ]. Moreover, this time constant value strongly agrees with previous reports of the time scale of photo-generation and electron–hole pair separation in other silicon samples [ 9 , 15 16 ].…”
Section: Resultssupporting
confidence: 92%
“…In fact, some results in this direction were already envisaged in some early ID transient studies. 48,49) This is further supported by the exponential decrease in transient time with increasing negative VBG biases (Fig. 5), which is associated with the GIDL exponential behavior, for which the backgate-to-drain voltage drop and BOX thickness determine the relevant surface electric field.…”
Section: Vbg and "Switch-off" Id Transientsmentioning
confidence: 64%
“…One of the most unique advantages of our model compared to previous strong inversion analysis [4][5][6][7] is that no knowledge is required on the carrier mobility and the effective channel length for the generation parameter extraction. In order to highlight this feature, we artificially forced different constant mobility values in Atlas, for an L g ϭ 0.1 m realistic structure and then extract geff , which was found independent on the input carrier mobility.…”
Section: Discussionmentioning
confidence: 99%
“…2,3 The induced ''generation'' transient is analytically modeled in two different switching regimes that correspond to: ͑i͒ real transistor operation switching ͑on to off state͒ and (ii) to a characterization-dedicated method ͑similar to the deep-depletion pulsing͒. The model is applied to the extraction of the generation lifetime in submicrometer PD SOI devices and the results are compared to other similar techniques [4][5][6][7] used in strong inversion. In opposition to these approaches, our model offers the outstanding advantage that no knowledge is necessary on the carrier mobility and on the effective channel length, which can be difficult to extract in short channel lengths.…”
mentioning
confidence: 99%