Determination of optical field generated by a microlens using digital holographic method

Kozacki, Tomasz; Jóźwik, Michał; Jozwicki, Romulad

doi:10.2478/s11772-009-0005-z

Cited by 15 publications

(5 citation statements)

References 8 publications

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“…This imaging setup has special features: first, lateral magnification is constant and independent of the object position. Second, the complex object wave is imaged without a phase quadratic term [46].…”

Section: A Measurement Systemmentioning

confidence: 99%

High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module

et al. 2014

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High-precision topography measurement of micro-objects using interferometric and holographic techniques can be realized provided that the in-focus plane of an imaging system is very accurately determined. Therefore, in this paper we propose an accurate technique for in-focus plane determination, which is based on coherent and incoherent light. The proposed method consists of two major steps. First, a calibration of the imaging system with an amplitude object is performed with a common autofocusing method using coherent illumination, which allows for accurate localization of the in-focus plane position. In the second step, the position of the detected in-focus plane with respect to the imaging system is measured with white light interferometry. The obtained distance is used to accurately adjust a sample with the precision required for the measurement. The experimental validation of the proposed method is given for measurement of high-numerical-aperture microlenses with subwavelength accuracy.

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Section: A Measurement Systemmentioning

confidence: 99%

High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module

et al. 2014

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“…Other techniques are based on the physical introduction of the same curvature in [16][17][18]: by wavefront folding [19] and by selfreference interferometry [20] for application in microfluidics or in the use of a single cube beam splitter in a nonconventional DHM configuration [21]. The use of a tube lens (TL) has been proposed for the nonholographic measurement of the focal length of microlenses [22].…”

Section: Imaging Process In Dhmmentioning

confidence: 99%

Digital holographic microscopy with pure-optical spherical phase compensation

et al. 2011

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Telecentric architecture is proposed for circumventing, by the pure-optical method, the residual parabolic phase distortion inherent to standard configuration of digital holographic microscopy. This optical circumvention produces several important advantages. One is that there is no need for computer compensation of the parabolic phase during the phase map recovering procedure. The other is that in off-axis configuration, the spatial frequency useful domain is enlarged. The validity of the method is demonstrated by performing quantitative measurement of depth differences with high axial resolution.

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“…Digital holography (DH) has been recognized as one of the most suitable methods for accurate shape measurement of microstructures [1][2][3][4][5][6]. Experimental systems are usually based on a Twyman-Green or Mach-Zehnder interferometer working in a reflection or transmission configuration, respectively.…”

Section: Introductionmentioning

confidence: 99%

Digital holography with multidirectional illumination by LCoS SLM for topography measurement of high gradient reflective microstructures

et al. 2015

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In this paper we present a method for topography measurement of high gradient reflective microstructures that overcomes the limited numerical aperture (NA) of a digital holographic (DH) system working in reflection. We consider a case when a DH system is unable to register the light reflected from the full sample area due to insufficient NA. To overcome this problem, we propose digital holography in a microscope configuration with an afocal imaging system and a modified object arm in the measurement setup. The proposed modification includes application of a spatial light modulator (SLM) based on liquid crystal on silicon (LCoS) technology for multidirectional plane wave illumination. The variable off-axis illumination enables characterization of the sample regions that cannot be imaged by the limited NA of a classical DH system utilizing on-axis illumination. In the proposed method, the final object topography is merged from a set of captured object waves corresponding to various illumination directions using a novel automatic algorithm. The proposed technique is experimentally validated by full-field measurement of a silicon mold with a high gradient of shape.

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Determination of optical field generated by a microlens using digital holographic method

Cited by 15 publications

References 8 publications

High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module

High-precision topography measurement through accurate in-focus plane detection with hybrid digital holographic microscope and white light interferometer module

Digital holographic microscopy with pure-optical spherical phase compensation

Digital holography with multidirectional illumination by LCoS SLM for topography measurement of high gradient reflective microstructures

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