2001
DOI: 10.1103/physrevb.63.035318
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Determination of strain fields and composition of self-organized quantum dots using x-ray diffraction

Abstract: We give a detailed account of an x-ray diffraction technique which allows us to determine shape, strain fields, and interdiffusion in semiconductor quantum dots grown in the Stranski-Krastanov mode. A scattering theory for grazing incidence diffraction is derived for the case of highly strained, uncapped nanostructures. It is shown that strain resolution can be achieved by ''decomposing'' the dots in their iso-strain areas. For a selected iso-strain area, it is explained how lateral extent, height above the su… Show more

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Cited by 153 publications
(115 citation statements)
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“…Instead, the interference of the EFI and the shape of the particle must be measured in terms of the depth integration over the discretized particle form factor multiplied by its subjected depthdependent EFI, with the integration step size determined by the spatial variation the EFI distribution, as in the Parratt algorithm for x-ray reflectivities from films 36 or the iso-strain model for grazing-incidence diffraction from the strain field of quantum dots. 37 Take a vertical cylinder spanned from the substrate to the film surface for example. In the Born approximation and conventional DWBA theories, this cylinder sees a uniform electric field so that the form factor is simply a Fourier transform of the shape function.…”
Section: -7mentioning
confidence: 99%
“…Instead, the interference of the EFI and the shape of the particle must be measured in terms of the depth integration over the discretized particle form factor multiplied by its subjected depthdependent EFI, with the integration step size determined by the spatial variation the EFI distribution, as in the Parratt algorithm for x-ray reflectivities from films 36 or the iso-strain model for grazing-incidence diffraction from the strain field of quantum dots. 37 Take a vertical cylinder spanned from the substrate to the film surface for example. In the Born approximation and conventional DWBA theories, this cylinder sees a uniform electric field so that the form factor is simply a Fourier transform of the shape function.…”
Section: -7mentioning
confidence: 99%
“…The composition can be assessed by exploiting the variation of unit cell size as a function of composition. 5,6 Compositional refinement is provided by probing changes of the scattering power in the vicinity of fundamental absorption edges ͑anomalous scattering͒. [7][8][9] However, all such studies rely on the assumption of a small dispersion in the properties of many individual islands: in a conventional XRD experiment, an x-ray spot is used, which is much larger than the islands and their spatial separation.…”
Section: Introductionmentioning
confidence: 99%
“…5 where the signal from strained dots dominates the (200) intensity profile is weaker in comparison to (400) intensity distribution. It means that the strained dots are composed not from pure InAs but from the In x Al 1−x As alloy [26]. From our previous studies the composition of strained dots grown at equal deposition conditions as the 500 • C-sample studied in current paper is close to In 0.8 Al 0.2 As [25].…”
Section: Resultsmentioning
confidence: 99%