2020
DOI: 10.1016/j.promfg.2020.03.014
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Determination of the Dynamic Young’s Modulus and Poisson’s Ratio Based on Higher Frequencies of Beam Transverse Vibration

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Cited by 9 publications
(4 citation statements)
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“…Various methods are developed to measure these parameters, including static methods, like nano-indentation [50,51] and dynamic methods like resonance response. [52][53][54][55] Many studies aiming to design highperformance nanomechanical resonators have relied on mechanical parameter values obtained from the literature without considering potential variations of thin film properties due to different deposition environments, such as commonly used materials like a-Si 3 N 4 , [10,12] c-Si, [14] and c-SiC. [15,16] While these adaptations are usually reasonable and align well with experimental results, characterizing the exact parameters of the materials used would be beneficial when exploring the optimal performance of nanomechanical resonators.…”
Section: Mechanical Property Characterization With Resonance Methodsmentioning
confidence: 99%
“…Various methods are developed to measure these parameters, including static methods, like nano-indentation [50,51] and dynamic methods like resonance response. [52][53][54][55] Many studies aiming to design highperformance nanomechanical resonators have relied on mechanical parameter values obtained from the literature without considering potential variations of thin film properties due to different deposition environments, such as commonly used materials like a-Si 3 N 4 , [10,12] c-Si, [14] and c-SiC. [15,16] While these adaptations are usually reasonable and align well with experimental results, characterizing the exact parameters of the materials used would be beneficial when exploring the optimal performance of nanomechanical resonators.…”
Section: Mechanical Property Characterization With Resonance Methodsmentioning
confidence: 99%
“…Excluding the base cone, where thermal gradient and cross-section variations may result in microstructural differences, the microstructure appears homogeneous and continuous along the build direction and shows no significant variations. Moreover, the dynamic properties of the specimen predominantly rely on the microstructure of the majority of the material volume involved in the test, and any minor variation in the microstructure would produce a negligible effect on the test results [63,72].…”
Section: Material's Microstructurementioning
confidence: 99%
“…The system is setup as figure 2.1. The impulse excitation technique setup is based on the ASTM E-1876 [10]. The specimen is placed on a structure with the supports of 0.224 of total length from each end.…”
Section: Setup Of the Systemmentioning
confidence: 99%