2008
DOI: 10.1063/1.2900579
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Determination of the electron density in plasma by means of a floating double probe

Abstract: Investigations are performed in a microwave plasma expansion containing argon-nitrogen gas mixture. The purpose of this work is to measure accurate electron density values by means of a floating double probe. We check the accuracy of the different methods developed for the double probe under different experimental conditions in Ar-N2 gas mixture, comparing results to single probe measurements. On the basis of previous works, we propose a simple way to determine the electron density without the knowledge of the… Show more

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Cited by 8 publications
(14 citation statements)
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“…This condition can be used to determine the ion velocity at the sheath edge. This value is necessary to calculate the electron density at ion saturation of a negative biased Langmuir probe [3,4,5].…”
Section: Resultsmentioning
confidence: 99%
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“…This condition can be used to determine the ion velocity at the sheath edge. This value is necessary to calculate the electron density at ion saturation of a negative biased Langmuir probe [3,4,5].…”
Section: Resultsmentioning
confidence: 99%
“…We show that the conditions on the ions velocity defined at the sheath edge in the case of a Maxwellian distribution cannot be used in the case of other distributions like a Druyvesteyn distribution. According to the plasma parameters, we discuss the collisionless condition used in the model, then the condition n i (χ) ≥ n e (χ) in the sheath, used to determine the ion velocity at the sheath edge [3,4,5]. All these results are correlated to previous works [3,4,6,7].…”
Section: Introductionmentioning
confidence: 94%
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“…However, these methods are not applicable for non-Maxwellian plasmas, and the electron density values can be overestimated with a discrepancy in the density up to two orders of magnitude. [10,11] In a previous work, we gave a simple method to determine the electron density for non-Maxwellian distributions, [12] considering the equality of ion and electron current at the floating potential (at V a = 0 V). However, this method is efficient only when V p and V f are very close to each other.…”
Section: Applicationmentioning
confidence: 99%
“…The use of Equations (11) and (12) is a numerical way to determine the best adjustment between f ( e ) and f v ( e ). However, different tests performed on theoretical examples have shown that C, k, and cannot be properly determined by using Equations (11) and (12) because the solution also depends on the value of f , which is unknown. So, a third equation is needed to determine these parameters.…”
Section: Applicationmentioning
confidence: 99%