Determination of the full scattering matrix using coherent Fourier scatterometry

Kumar, Nitish; Cisotto, Luca; Roy, S.; Ramanandan, Gopika K. P.; Pereira, Silvania F.; Urbach, H. P.

doi:10.1364/ao.55.004408

Cited by 8 publications

(12 citation statements)

References 22 publications

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“…4 and 5 in Ref. [19]). This simulation considered the nominal parameters of the fabricated grating and it contains the main features of the far field that it expected from the experiment.…”

Section: Computational Proceduresmentioning

confidence: 92%

Phase retrieval applied to coherent Fourier scatterometry using the extended ptychographic iterative engine

Dwivedi¹,

Sakamoto²,

Pereira³

2019

OSA Continuum

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We have demonstrated that the extended ptychographic iterative engine (ePIE) algorithm can be applied to retrieve the phase information of the vectorial scattered field of a subwavelength object with the amplitude of the scattered field as input. We applied this technique combined with coherent Fourier scatterometry to determine the phase of the scattered field of a subwavelength grating, illuminated by a focused laser beam.

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“…4 and 5 in Ref. [19]). This simulation considered the nominal parameters of the fabricated grating and it contains the main features of the far field that it expected from the experiment.…”

Section: Computational Proceduresmentioning

confidence: 92%

Phase retrieval applied to coherent Fourier scatterometry using the extended ptychographic iterative engine

Dwivedi¹,

Sakamoto²,

Pereira³

2019

OSA Continuum

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show abstract

“…The original and retrieved modulus of image in the TMTM case with different algorithms after 600 iterations. The original image was obtained from simulation (described in [16]). Poisson noise and white Gaussian noise with signal to noise ratio of 100 was applied to the initial intensity pattern.…”

Section: Simulationmentioning

confidence: 99%

“…8. Comparison of (a) modulus and (b) phase of images obtained from phase retrieval, interferometric measurement and simulation (the latter two cases are reproduced from [16]).…”

Section: Phase Retrieval From Reconstructed Intensity Patternsmentioning

confidence: 99%

“…In order to test the accuracy of the retrieved images, the images in the TMTM and TMTE cases obtained by phase retrieval are compared with that from the direct measurement of the phase using interferometry as well as from simulations [16], as shown in Fig. 8.…”

Section: Phase Retrieval From Reconstructed Intensity Patternsmentioning

confidence: 99%

“…In section 3, we will present simulations applied with these algorithms to retrieve the phase and amplitude of the scattered far field of a sub-wavelength grating illuminated by a focused laser beam. Then in section 4 the retrieved field from measurement data will be shown and compared with results obtained from interferometric data and also from simulations (previously reported in [16]). Finally we will conclude our discoveries in section 5.…”

Section: Introductionmentioning

confidence: 97%

See 2 more Smart Citations

Phase retrieval of the full vectorial field applied to coherent Fourier scatterometry

Xu¹,

Konijnenberg²,

Pereira³

et al. 2017

Opt. Express

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Coherent Fourier scatterometry is an optical metrology technique that utilizes the measured intensity of the scattered optical field to reconstruct certain parameters of test structures written on a wafer with nano-scale accuracy. The intensity of the scattered field is recorded with a camera and this information is used to retrieve the grating parameters. To improve sensitivity in the parameter reconstruction, the phase of the scattered field can also be acquired. Interferometry can be used for this purpose, but with the cost of cumbersomeness. In this paper, we show that iterative phase retrieval methods can be applied to retrieve the scattered complex fields from only intensity measurement data. We show that the accuracy of the retrieved complex fields using phase retrieval is comparable to that measured directly using interferometry.

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Far-field sectioning for the retrieval of subwavelength grating parameters using coherent Fourier scatterometry

Šiaudinytė

Pereira

2020

Meas. Sci. Technol.

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Optical inspection of periodic nanostructures is a major challenge in the semiconductor industry due to constantly decreasing critical dimensions. In this paper we combine coherent Fourier scatterometry (CFS) with a sectioning mask for subwavelength grating parameter determination. By selecting only the most sensitive regions of the scattered light in the Fourier plane, one can retrieve grating parameters faster and with higher sensitivity than previous approaches. Moreover, the full process of CFS using focused light is explained and implemented in a subwavelength grating regime. The results of using transverse magnetic polarized input fields together with the proposed sectioning mask are presented and compared to the non-mask case.

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Determination of the full scattering matrix using coherent Fourier scatterometry

Cited by 8 publications

References 22 publications

Phase retrieval applied to coherent Fourier scatterometry using the extended ptychographic iterative engine

Phase retrieval applied to coherent Fourier scatterometry using the extended ptychographic iterative engine

Phase retrieval of the full vectorial field applied to coherent Fourier scatterometry

Far-field sectioning for the retrieval of subwavelength grating parameters using coherent Fourier scatterometry

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