Determination of thicknesses and refractive indices of polymer thin films by multiple incident media ellipsometry

Hybridization of ellipsometry and XPS energy loss: Robust band gap and broadband optical constants determination of SiGe, HfON and MoOx thin films

“…We can put the spotlight on two main information:  First, we can observe that the determined thickness using the hybrid model (either using Mo3p or O1s ELS), were systematically slightly higher than using XRR measurements (1-2Å). This small offset between XRR and our hybrid model have been reported in numerous studies concerning XRR and ellipsometry [40][41][42][43][44][45], and thus could be attributed to the influence of the substrate, the film interfaces, inaccurate values of optical constants of the film, or inaccurate determination of roughness top layer of the structure.  Despite this small offset, we can observe the high correlation of the determined thickness when compared with the hybrid model and XRR measurement point by point, confirming the high robustness of the hybrid model, with Pearson's correlation coefficients of 0.954 and 0.921 for the XRR along with the hybrid model with Mo3p or O1s ELS respectively.…”

Ice thickness monitoring for cryo-EM grids by interferometry imaging

“…In addition, the use of complex algorithms is required to achieve thickness determination with nano-scale z-height resolution. Similar drawbacks apply to other 2D-measurement based approaches like spectrophotometric- 19,20 , ellipsometric-21 or white-light interferometry-imaging 16 . Furthermore, these techniques were developed for the thickness determination of typically thin inorganic films such as polymers or semiconductors.…”

“…The determination of amorphous ice thickness proves to be difficult with most conventional techniques for film thickness measurements like spectroscopy and ellipsometry since they are generally single-point measuring methods and suffer from low spatial resolution 16 . An appealing solution for the two-dimensional thickness measurement with a relatively simple setup design is to illuminate a larger region of the sample with three-wavelengths simultaneously, and to capture the interference patterns produced by the sample with a colour camera 17 , 18 .…”

Spectroscopic Ellipsometry and Quartz Crystal Microbalance with Dissipation for the Assessment of Polymer Layers and for the Application in Biosensing

“…The N of some polymers has been measured using SE due to its high precision and nondestructive nature [40][41][42]. Thin films of poly(9,9-di-n-octylfluorene-alt-benzothiadiazole) polymers exhibited anisotropic optical constants with larger in-plane values of the n and k in comparison to out-of-plane values.…”