2000
DOI: 10.2116/analsci.16.69
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Determination of Ultratrace Impurities in High Purity Tantalum Materials by On-line Anion Exchange Matrix Separation and Inductively Coupled Plasma Mass Spectrometry

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Cited by 9 publications
(3 citation statements)
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“…The source terms were estimated from the known impurities in the precursor to Ta 2 O 5 , tantalum (V) ethoxide (Ta(C 2 H 5 O) 5 ). A previous analysis of tantalum (V) ethoxide found the U/Th content to be <0.04 ng/g (0.047 pg/cm 2 ) in the material (Kozono et al, (2000)). The vendor's chemical analysis yielded <1 ppm (1.169 ng/cm 2 ) of natural potassium (McLean and Watterson (Personal Communication)).…”
Section: Radioactivity In the Reflective Coatingmentioning
confidence: 88%
“…The source terms were estimated from the known impurities in the precursor to Ta 2 O 5 , tantalum (V) ethoxide (Ta(C 2 H 5 O) 5 ). A previous analysis of tantalum (V) ethoxide found the U/Th content to be <0.04 ng/g (0.047 pg/cm 2 ) in the material (Kozono et al, (2000)). The vendor's chemical analysis yielded <1 ppm (1.169 ng/cm 2 ) of natural potassium (McLean and Watterson (Personal Communication)).…”
Section: Radioactivity In the Reflective Coatingmentioning
confidence: 88%
“…A column for anion-exchange chromatography to separate the matrix (tantalum) from impurities was built directly into the system of sample introduction into the ICP. 10 Determination of contaminants in silicon and germanium on the ICP-MS spectrometer ELEMENT achieved their preconcentration by halogenation and distillation of the probe matrix from the solution. 35 The detection limits for the contaminants were 10 711 mass % ± 10 76 mass %.…”
Section: Sampling Proceduresmentioning
confidence: 99%
“…For the determination of impurity elements in tantalum materials, anion/cation exchange or solvent extraction pretreatment procedures have been reported in combination with inductively coupled plasma atomic emission spectrometry (ICP-AES), spectrophotometry or inductively coupled plasma mass spectrometry (ICP-MS). [4][5][6][7][8][9] Some studies employed graphite furnace atomic absorption spectrometry (GFAAS) without matrix separation. 10,11 However, such reports did not focus on non-metallic elements such as phosphorus, boron, silicon, etc., although these elements are often used as donors or acceptors in electronic devices.…”
Section: Introductionmentioning
confidence: 99%