2018
DOI: 10.1088/1361-6463/aaa55d
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Determining the layers’ Young’s moduli and thickness from the indentation of a bilayer structure

Abstract: The inverse problem of determining three parameters: the film thickness, the film and substrate Young's moduli of a film/substrate bilayer by indentation, is formulated and solved. The physical mechanism for the solvability of the inverse problem is that these three parameters have different impacts at different indentation depth. Their impacts are systematically studied, which also provides a different approach of finding the three parameters or refining their range. Compared with various atomic force microsc… Show more

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Cited by 9 publications
(7 citation statements)
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“…While no analytical solution exists for the bilayer problem, some empirical expressions have been identified in the literature, where the decay has been described by a generalized form [ 53 ]: where the function decays from 1 to 0 over a range related to . In particular, it has been shown that either a trigonometric [ 54 ] or exponential [ 55 , 56 ] decay well approximates the experimental behavior.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…While no analytical solution exists for the bilayer problem, some empirical expressions have been identified in the literature, where the decay has been described by a generalized form [ 53 ]: where the function decays from 1 to 0 over a range related to . In particular, it has been shown that either a trigonometric [ 54 ] or exponential [ 55 , 56 ] decay well approximates the experimental behavior.…”
Section: Resultsmentioning
confidence: 99%
“…Here we extended the same simulation approach to obtain a set of numerical F (δ) curves and exploited Eq. While no analytical solution exists for the bilayer problem, some empirical expressions have been identified in the literature, where the decay has been described by a generalized form [53]:…”
Section: Bilayer Modelmentioning
confidence: 99%
“…In the case where the indenter radius ( R ) is on the order of, or larger than, the foundation thickness ( h ), the thickness plays a role in the adhesion [ 34–36 ] and mechanical behavior. [ 37–40 ] Therefore, the total energy in the system ( U T ) is a summation of the surface energy U S = πR 2 G c , where G c is the critical strain energy release rate, and the elastic energy U E = F 2 h (Δ P )/2 πE (Δ P ) R 2 . [ 34 ] For a contact area ( A ), the adhesive capacity is determined when ∂ U T /∂ A = 0, where Fc = 2π2Efalse(normalΔPfalse)GcR4hfalse(normalΔPfalse)1/2 which shows the dependence of F c on the applied pneumatic pressure in modulus and thickness.…”
Section: Figurementioning
confidence: 99%
“…Fig.3b highlights the expected decay of the elasticity from the cortex to the bulk, over an indentation depth comparable with d 0 . While no analytical solution exists for the bilayer problem, some empirical expressions have been identified in the literature, where the decay has been described by a generalized form [50]:…”
Section: Bilayer Modelmentioning
confidence: 99%