2014
DOI: 10.1088/2053-1583/1/1/011002
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Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping

Abstract: Deterministic transfer of two-dimensional crystals constitutes a crucial step towards the fabrication of heterostructures based on artificial stacking of two-dimensional materials. Moreover, control on the positioning of two-dimensional crystals facilitates their integration in complex devices, which enables the exploration of novel applications and the discovery of new phenomena in these materials. Up to date, deterministic transfer methods rely on the use of sacrificial polymer layers and wet chemistry to so… Show more

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Cited by 1,735 publications
(1,673 citation statements)
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References 27 publications
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“…18 We fabricate b-P based FET S by standard e-beam lithography, metal deposition (Ti/Au 5/50nm) and lift-off. In Figure 1a we show an optical micrograph of the fabricated b-P FET.…”
Section: Main Textmentioning
confidence: 99%
“…18 We fabricate b-P based FET S by standard e-beam lithography, metal deposition (Ti/Au 5/50nm) and lift-off. In Figure 1a we show an optical micrograph of the fabricated b-P FET.…”
Section: Main Textmentioning
confidence: 99%
“…Our samples were prepared by mechanical exfoliation of WSe 2 bulk crystals (commercially acquired from HQgraphene) on viscoelastic substrates and were subsequently transferred onto diamond. 40 Monolayer flakes with typical diameters of the order of 100 μm were identified by photoluminescence and reflectance contrast spectroscopy. An overview of the basic experimental concept is schematically illustrated in the inset of Figure 1b.…”
mentioning
confidence: 99%
“…For this, we use Gel-Film T M pieces (Gelpak) as an intermediate substrate, and suitable monolayer flakes are then stamped onto the final substrate (silicon covered with a 285 nm SiO 2 layer and pre-defined metal markers) using an all-dry transfer technique 24 . The investigated samples are identified as HQ (monolayer flake prepared from HQ graphene MoSe 2 bulk crystal) and n-2D (monolayer flake prepared from n-doped 2D semiconductors MoSe 2 bulk crystal) throughout the manuscript.…”
mentioning
confidence: 99%