Development and characterization of carbon nanotube processes for NRAM technology

Abstract

NRAM technology, a non-volatile memory based on the use of carbon nanotubes, overcomes the limitations of other memory technology types (including traditional Flash), for sub-40nm nodes, and is currently developed in manufacturing fabs. The NRAM technology process flow involves the deposition of a film of carbon nanotubes onto silicon wafers at several of the critical layers (using spin coating techniques). In this paper, we present the key steps of the development and characterization of carbon nanotube processes applied to NRAM technology, focusing on specific deposition techniques, thickness control, and defectivity.

Nanoparticle Manufacturing – Heterogeneity through Processes to Products

“…In particular, the technology to assemble nanoparticles with precision and yield equivalent to conventional CMOS devices does not yet exist. Therefore, researchers often consider niche applications of carbon nanotubes in logic devices . Photonic devices present similar challenges of quality control for single-wall carbon nanotubes, while presenting new application opportunities.…”

“…Therefore, researchers often consider niche applications of carbon nanotubes in logic devices. 396 Photonic devices present similar challenges of quality control for single-wall carbon nanotubes, while presenting new application opportunities. Various sensors have lesser constraints for quality control and present new application opportunities for consumer products.…”