Development and manufacturing of the receiver telescope for the Ganymede Laser Altimeter (GALA)

Lukowicz, Henrik von; Hartung, Johannes; Jende, Robert; Müller, Sandra; Rohde, Mathias; Kinast, Jan; Kleinbauer, K.; Shestaeva, Svetlana; Schwinde, Stefan; Peschel, Thomas; Weidlich, Kai; Wegert, Henry; Risse, Stefan

doi:10.1117/12.2631688

Cited by 2 publications

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“…Process chain of metal optics. [7] Typically, metal optics consist of polishable, amorphous nickel-phosphorus (NiP) plated aluminum alloys Al6061 which are well machinable by DT [6]. A roughness < 10 nm RMS and shape deviations < 2 μm P. -V. are achievable.…”

Section: Manufacturing Proceduresmentioning

confidence: 99%

Super-polished metallic freeform optics for EUV-application

Porwol,

Kinast,

Cai

et al. 2024

Optical and EUV Nanolithography XXXVII

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Super-polished optics are crucial components for extremely short wavelength applications. One of the main applications are illumination optics. Short operational wavelengths of ~13,5 nm lead to high demands on substrate's surface quality, especially for microroughness features in the high spatial frequency range (HSFR). The excellent surface quality is essential for high-performant reflective mirrors.Typically, mirror substrates for EUV applications are made of glass, glass-ceramics and silicon. This paper describes an alternative approach by using metallic substrates made from electroless Nickel-Phosphorous (NiP) plated Aluminum alloys. The X-Ray amorphous NiP alloy enables several polishing and correction techniques to reduce the surface roughness down to the addressed sub-nm range. The process chain of metal optics includes ultra-precise diamond turning (DT) and chemical mechanical polishing (CMP) steps. Microroughness (HSFR) of < 0.2 nm RMS (AFM, 1 × 1 µm 2 ) by CMP could be generated on flat and curved surfaces as well as on freeform optics. The process chain will be verified by surface characterization techniques, e.g. atomic force microscopy and white light interferometry. The data is evaluated using the established PSD (power spectral density) analysis method. Conclusions about the surface errors concerning the different processing technologies can be verified. This paper shows that super-polished metallic freeform optics are suitable for curved EUV illumination optics.

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Section: Manufacturing Proceduresmentioning

confidence: 99%

Super-polished metallic freeform optics for EUV-application

Porwol,

Kinast,

Cai

et al. 2024

Optical and EUV Nanolithography XXXVII

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show abstract

Additive manufacturing of variothermal injection moulding insert made of Al-40Si

Frasch,

Schwinger,

Traxdorf

et al. 2024

Int J Adv Manuf Technol

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Injection moulding has been a pivotal technology in the mass production of polymer optics for many years. The surface quality of the moulding inserts exerts a significant influence on the quality of the optics produced. In the production of micro-structured polymer optics, such as Fresnel lenses, conventional isothermal injection moulding is unable to achieve the requisite surface accuracy. Variothermal injection moulding allows for improved surface accuracy and reduced residual stresses, but increases technical effort and cycle times. To reduce the cycle time and residual stresses of variothermal injection moulding, the potential of additive manufacturing of Al-40Si for the fabrication of moulding inserts is investigated. In order to achieve these objectives, the offered design freedom of additive manufacturing is investigated with a view to developing optimised conformal cooling channels. Numerical methods will be used for thermal and structural analyses. The performance of the newly developed moulding insert is evaluated experimentally by thermographic measurements and the measurement of stress birefringence on replicated PMMA samples.

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Development and manufacturing of the receiver telescope for the Ganymede Laser Altimeter (GALA)

Cited by 2 publications

References 0 publications

Super-polished metallic freeform optics for EUV-application

Super-polished metallic freeform optics for EUV-application

Additive manufacturing of variothermal injection moulding insert made of Al-40Si

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