“…B 4 C and SiC were chosen as the reflective coating materials for the LCLS soft x-ray and hard x-ray optics respectively, due to their predicted high damage thresholds against the LCLS FEL beam compared to other coating materials, combined with the good reflective performance and absence of electronic absorption edges in the 0.827-2 keV (for B 4 C in the soft x-ray) and 2 -24 keV (for SiC in the hard x-ray) energy ranges of operation. Our group at Lawrence Livermore National Laboratory (LLNL) has led a team composed of national laboratories and industry in the design, specification, fabrication, coating and precision surface metrology of all the x-ray mirrors installed at LCLS, and these topics are discussed in detail in earlier references 2,3,4,5,6,7 . The B 4 C and SiC coatings of the LCLS x-ray mirrors were developed at * e-mail: regina.soufli@llnl.gov, phone: 925-422-6013 LLNL and were deposited by DC-magnetron sputtering 8 on precisely figured and polished Si substrates supplied by commercial vendors.…”