2013
DOI: 10.1002/mop.27824
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Development of 5.5‐GHz Band Pass Filter in All Silicon Multilayer Substrate with Air Dielectric

Abstract: A compact 5.5‐GHz band pass filter (BPF) with 12.7% 3‐dB bandwidth is developed in an all silicon multilayer substrate with air dielectric incorporated for WiMax applications. The topology of the BPF is a capacitively coupled fifth‐order Chebyshev BPF. Its volume is 9.3 × 8.5 × 0.6 mm3. Two design aspects—air dielectric and through silicon via (TSV) technology integration—play an essential role in the BPF implementation. The spiral inductor with an integrated air dielectric has quality factor and self‐resonant… Show more

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“…At the opposite, such structures can be designed to increase reflectivity and can be used as optical mirrors to achieve high reflectivity either at a fixed wavelength 3 or in a broad frequency range 4 . Various other applications are possible, for example, as beam splitters, 5,6 filters that transmit (or reflect) parts of the spectrum, 7‐10 polarizers, 11 plasmonic devices, 12 to improve Raman spectroscopy, 13 to localize field, 14‐16 and so on.…”
Section: Introductionmentioning
confidence: 99%
“…At the opposite, such structures can be designed to increase reflectivity and can be used as optical mirrors to achieve high reflectivity either at a fixed wavelength 3 or in a broad frequency range 4 . Various other applications are possible, for example, as beam splitters, 5,6 filters that transmit (or reflect) parts of the spectrum, 7‐10 polarizers, 11 plasmonic devices, 12 to improve Raman spectroscopy, 13 to localize field, 14‐16 and so on.…”
Section: Introductionmentioning
confidence: 99%