Development of a High-Precision Optical Force Sensor With μN-Level Resolution

Cheng, Zhihao; Liu, Xin; Lei, Ying-Jun; Pan, Qiaosheng; Li, Ruijun

doi:10.1109/jsen.2022.3176447

IEEE Sensors J.

2022

DOI: 10.1109/jsen.2022.3176447

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Development of a High-Precision Optical Force Sensor With μN-Level Resolution

Zhihao Cheng

Xin Liu

Ying-Jun Lei

et al.

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Cited by 9 publications

References 40 publications

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Multifunctional MEMS Sensors for Measuring Force and Acceleration Dependent on Graphene-Induced Nonradiative Transitions

Li,

Lv,

Liu

et al. 2024

ACS Appl. Nano Mater.

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The investigation focuses on a microelectromechanical system (MEMS) force-acceleration sensor utilizing grapheneinduced nonradiative transitions. The research results indicate that the sensor's performance is highly sensitive to distance, enabling remarkable performance while downsizing the MEMS sensor. As a force sensor, it has a measurement range of 0−88 nN and a sensitivity of −1.004%/nN. In terms of acceleration sensing, it boasts a linear measurement range of ±50 g with an optical system sensitivity of 1.131%/nm, a mechanical sensitivity of 1.94 nm/g, low cross-axis sensitivity at 0.014%, and a high accelerometer sensitivity of up to −2.192%/g. Moreover, the sensor can perform long-distance optical charging and detection without the need for integrated batteries and antennas, making it highly promising for applications in various industries such as microintelligent devices, wearables, biomedicine, the Internet of Things, autonomous driving, and aerospace.

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Multifunctional MEMS Sensors for Measuring Force and Acceleration Dependent on Graphene-Induced Nonradiative Transitions

Li,

Lv,

Liu

et al. 2024

ACS Appl. Nano Mater.

View full text Add to dashboard Cite

show abstract

Intelligent sensing for the autonomous manipulation of microrobots toward minimally invasive cell surgery

Gao,

Bai,

Yang

et al. 2024

Applied Physics Reviews

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The physiology and pathogenesis of biological cells have drawn enormous research interest. Benefiting from the rapid development of microfabrication and microelectronics, miniaturized robots with a tool size below micrometers have widely been studied for manipulating biological cells in vitro and in vivo. Traditionally, the complex physiological environment and biological fragility require human labor interference to fulfill these tasks, resulting in high risks of irreversible structural or functional damage and even clinical risk. Intelligent sensing devices and approaches have been recently integrated within robotic systems for environment visualization and interaction force control. As a consequence, microrobots can be autonomously manipulated with visual and interaction force feedback, greatly improving accuracy, efficiency, and damage regulation for minimally invasive cell surgery. This review first explores advanced tactile sensing in the aspects of sensing principles, design methodologies, and underlying physics. It also comprehensively discusses recent progress on visual sensing, where the imaging instruments and processing methods are summarized and analyzed. It then introduces autonomous micromanipulation practices utilizing visual and tactile sensing feedback and their corresponding applications in minimally invasive surgery. Finally, this work highlights and discusses the remaining challenges of current robotic micromanipulation and their future directions in clinical trials, providing valuable references about this field.

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Highly Sensitive Fiber-Optic Fabry–Perot Microforce Probe

Liu,

Zheng,

Peng

et al. 2025

J. Lightwave Technol.

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Development of a High-Precision Optical Force Sensor With μN-Level Resolution

Cited by 9 publications

References 40 publications

Multifunctional MEMS Sensors for Measuring Force and Acceleration Dependent on Graphene-Induced Nonradiative Transitions

Multifunctional MEMS Sensors for Measuring Force and Acceleration Dependent on Graphene-Induced Nonradiative Transitions

Intelligent sensing for the autonomous manipulation of microrobots toward minimally invasive cell surgery

Highly Sensitive Fiber-Optic Fabry–Perot Microforce Probe

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