2013
DOI: 10.1541/ieejsmas.133.139
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Development of a High-Throughput DNA Fiber Analysis Device Using MEMS Technology

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Cited by 2 publications
(4 citation statements)
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“…For fabricating the well mold with inclined structures, SU‐8 is processed by rotated/inclined exposure method that supports batch processing of 3D microstructures with a single mask. With this method, a substrate with applied resist is placed on an inclined rotary stage, and exposure is performed from the substrate backside while rotating the stage.…”
Section: Fabrication Of Micro‐inclined Well Arraymentioning
confidence: 99%
See 1 more Smart Citation
“…For fabricating the well mold with inclined structures, SU‐8 is processed by rotated/inclined exposure method that supports batch processing of 3D microstructures with a single mask. With this method, a substrate with applied resist is placed on an inclined rotary stage, and exposure is performed from the substrate backside while rotating the stage.…”
Section: Fabrication Of Micro‐inclined Well Arraymentioning
confidence: 99%
“…In this context, we propose a micro‐inclined well array with tapered walls for effective cell immobilization. As regards fabrication of inclined structures, we fabricated well arrays by PDMS molding into molds produced by rotated/inclined exposure method . We carried out bead immobilization experiments with prototype arrays to estimate residual rate of immobilized beads after liquid exchange.…”
Section: Introductionmentioning
confidence: 99%
“…For fabricating the well mold with inclined structures, SU-8 is processed by rotated/inclined exposure method 15,16 that supports batch processing of 3D microstructures with a single mask. With this method, a substrate with applied resist is placed on an inclined rotary stage, and exposure is performed from the substrate backside while rotating the stage.…”
Section: Fabrication Of Micro-inclined Well Arraymentioning
confidence: 99%
“…As regards fabrication of inclined structures, we fabricated well arrays by PDMS molding into molds produced by rotated/inclined exposure method. 15,16 We carried out bead immobilization experiments with prototype arrays to estimate residual rate of immobilized beads after liquid exchange. In addition, we carried out cell immobilization experiments to compare and evaluate well arrays with conventional vertical wells and inverse-tapered wells as proposed in this study.…”
Section: Introductionmentioning
confidence: 99%