“…SiO x N y , Si 3 N 4 , and SiO 2 must be treated with oxygen (O 2 ) plasma or a piranha solution to generate hydroxyl groups (–OH) on the surface. However, titanium (Ti) is cheap, and TiO 2 can generate –OH groups on its surface through a photocatalyst reaction, 3,5 which can reduce the cost and simplify the experimental steps. Therefore, TiO 2 was selected as the waveguide-layer material for this study.…”