2002
DOI: 10.1163/156856304773954313
|View full text |Cite
|
Sign up to set email alerts
|

Development of a mobile nanohandling robot

Abstract: Miniaturized nanohandling robots or microrobots are widely used in different elds of application (e.g. microassembly, handling of biological cells or characterisationof nano layers), when a high positioning accuracy in the low ¹m or nm-range is required. A robot-based nanohandling station using a scanning electron microscope (SEM) or a light microscope is introduced. The microrobots working in that nanohandling station are driven by a novel actuator system. These actuators enable the microrobots to perform mov… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
13
0

Year Published

2006
2006
2023
2023

Publication Types

Select...
4
3
2

Relationship

0
9

Authors

Journals

citations
Cited by 28 publications
(13 citation statements)
references
References 5 publications
0
13
0
Order By: Relevance
“…In vacuum or in liquid, capillary forces can often be eliminated. This justifies the micro/nano handling in SEM (with vacuum) [3] and submerged environment [4]. Capillary force can also be reduced by using different material, e.g.…”
Section: Scaling Effect and Adhesion Forcesmentioning
confidence: 93%
“…In vacuum or in liquid, capillary forces can often be eliminated. This justifies the micro/nano handling in SEM (with vacuum) [3] and submerged environment [4]. Capillary force can also be reduced by using different material, e.g.…”
Section: Scaling Effect and Adhesion Forcesmentioning
confidence: 93%
“…Such a software has to take the physical and technical constraints of the small scale in account to be reliable and applicable at all [27]. This includes, as described previously, microscope systems as main sensor (e.g., the SEM [17], [18]), the predominant adhesive forces, and direct actuation principles [28]. A few examples of such software, developed in recent years, include: software from PRONOMIA research project by Gauthier et al [27], [29], the nanomanipulation control framework developed at the USC by Arbuckle et al [30] or the OFFIS Automation Framework (OAF) developed at the University of Oldenburg [31].…”
Section: B Control Setupmentioning
confidence: 99%
“…The previous working principle relies on a segmented piezodisc and three rotating steel spheres [11], [12], [13]. The steel spheres carry the platform itself and roll up on the working surface.…”
Section: A Working Principle Of Rollbotmentioning
confidence: 99%